SMC Corporation of America
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AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

Construction: AS1000-M5 Component Parts No. Description Material 1 2 3 4 No.

MXF16 MXF16 10 6.5 M4 x 0.7 2.1 M4 x 0.7 2.1 MXF20 MXF20 12 9.5 M5 x 0.8 4.4 M5 x 0.8 4.4 Caution To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If the bolts are too long, they hit the end plate and may cause malfunctions. 8-6-8 9 Low Profile Slide Table Series MXF Construction !6 t !3 !4 !

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 Option Port size M5 x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low

Q = T x L x x C 860 Q = T x L x x C 60 x 1000 6.0 x 1.2 x 1.80 x 103 x 0.23 860 = 6.0 x 20 x 1.80 x 103 x 0.96 x 103 = = 3.5 kW 60 x 1000 Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW = 3456 W = 3.5 kW Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW Circulating equipment T2: Return temperature Customers equipment L T = T2 T1 T1: Outlet

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G

Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV