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-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

color indication type). 2 x JC depth JD BH BI (UU) CRB2 2 x M3 x 0.5 (Opposite side, same location) Q H 2 x J through CRBU2 1.5 JA depth of counterbore JB (Opposite side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side

Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D

(IR1000:F.S.=0.2MPa,IR1010:F.S.=0.4MPa,IR1020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR1000 0.005MPa) 1 IR1000 IR1010 IR1020 [MPa] MAX. 1.0 [MPa] () 0.05 [MPa] 0.0050.2 0.010.4 0.010.8 0.2% 0.5% 4.4L/min(ANR) [1.0MPa ] -560 Rc1/8 Rc1/8 [2 ] 0.14kg (1) (0.05MPa) (2) IR1000:0.2MPa (3)2 ON-OFF () (4) -4- (C)2 (C) (A) (A) (C) (A) (C) BLEED SUP(1) OUT(2) SUP N

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller. ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

4 !3 !2 No. Description Note 1 Stud ZK2 2 Strainer 3 Mounting bracket !1 ZQ 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) y ZR 5 Lock pin 6 Check valve ZB 7 Lock plate !5 ZA Replacement Parts ZX No. Description Part no.

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

x P (Rc, NPT, G) NA AL F Width across flats B1 H1 2 x NN Standard port Relief port M5 x 0.8 H2 I Relief port D C B 4 x LD LH MM 2 x 4 3.2 N X Y N X Y S + Stroke LX LS + Stroke Z LZ ZZ + Stroke (mm) AL LH LS LZ MM G NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000