Series VS

22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5 49.5 1/4, 3/8,1/2 P PORT 152.5 165.5 ALL DIMENSIONS ARE IN MILLIMETERS 11 Series VS R8b S ISO SIZE 2-3 SUB-BASE VS8w 03/04/06/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR

mlu

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

HRX-OM-Y120

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

Compact Cylinder

Example) Bolt M5 x 60 L 2 pcs.

Thermo-con/Rack Mount Type

Signal contents N 100-240 VAC L 100-240 VAC E PE 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 2.

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

RLQ

through 2 x 2-9 counterbore depth 7 9 7.5 60 6.5 16 45 27 48.1 2-Cushion needle Dust cover (Manual unlocking unit) 14 34 76 + Stroke 37 + Stroke 32 7 4.5 45 52.7 Retraction locking LOCK Unlocks when pressurized PL unlocking port 22.5 13.5 PL Pc Port thread type Rc NPT G 1/8 1/8 M5 x 0.8 Dust cover (Manual unlocking unit) Rod end male thread M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 9-12-10 11

Compact Cylinder with Air Cushion and Lock Series RLQ

16 27 45 34 48.1 2 x Cushion needle Dust cover (Manual unlocking unit) 14 34 76 + Stroke 37 + Stroke 32 7 4.5 45 52.7 Retraction locking LOCK PL Unlocking port 22.5 Unlocks when pressurized 13.5 Pc PL Port thread type Rc NPT G 1/8 1/8 M5 x 0.8 Dust cover (Manual unlocking unit) Rod end male thread M14 x 1.5 8 20.5 23.5 28.5 Rod end nut Refer to page 857 for details of rod end nuts and accessory

3M/SMseries

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

Compact manifold regulator ARM5 Series

Centralized Supply (IN) Piping Position AR425 to 935 Piping position 1 Bottom 2 Symbol Top ARX IN AMR Appearance ARM ARM 33 IN ARP 2. IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3.

Compact Cylinder with Air Cushion Series RQ

52 20 M8 x 1.25 69 5 14 7 40 5.5 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 30 to 100 mm Bore size (mm) OB P Q RB W Z 32 40 50 9 23 7 49.5 14 1/8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

DOC1003626

. 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14 Serial communication . 3

HRX-OM-W069

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

AC Servo Motor Driver (SSCNET Type)

(Note 6) SSCNET cable (option) 10k Plate SD 2m Max CN1A SW1 (Note 8) SW2 CN1B 2 1 (Note 1) Between electrodes MR-J3-B LECSS-S (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 MR-J3-B (Note 7) LECSS-S (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2

VK300

Poppet Solenoid Valve Rubber Seal Series VK300 Type 21 Manifold Body Ported (Top ported) n1 = Number of VK300 VV3K3-21Stations Grommet: G DIN terminal: D Grommet: G DIN terminal: D Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 V100 SY 300 (Lead wire length) 2-Rc 1/8 (P port) 2-Rc 1/8 (P port) n1-Rc 1/8 (A port) 2-4.5 (Mounting hole) SYJ VK (Pitch) VZ Courtesy of Steven Engineering

SI Unit for Vacuum Manifold

Table. 3-2 Overview of modules for the SI Unit Occupied bytes Allowable slot Note Input Output Module Selected head module EX260-VPN1 ( 4) EX260-VPN1 ( 8) 2 bytes 2 bytes Vacuum / Release Vacuum / Release Refer to Section 5.1.

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !