101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

AC Servo Motor Driver (CC-Link Type)

(Warnings are not displayed.) -128- Revision history No.JXC OMW0030 Jun./2019 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

OMS0020

95 5F _ 127 7F DEL 42 Revision history 1st edition: December 2014 A: Revised in July 2015 B: Revised in November 2015 C: Revised in June 2020 D: Revised in January 2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com/ NOTE: Specifications are subject to change without prior notice and any obligation on the part of

OMR0032

For details of the COM port checking and setting methods refer to the LATC Configurator Configuration Software Installation Manual". 101 - Check that the LATCA controller, communication cable, USB cable, and PC are connected correctly. For example, communication cannot be established if the connector has been damaged.

Vacuum Gripper

A: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -31No. TQ1230001-OM105-A

Vacuum Gripper

D: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -36No. TQ1230001-OM101-D

Vacuum Gripper

B: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -36No. TQ1230001-OM102-B

Vacuum gripper

port Built-in One-touch fittings (4) Built-in One-touch fittings (6) Power supply voltage [V] 24 VDC 10% Max. vacuum pressure [kPa] note4) -84 Suction flow rate [L/min(ANR)] note4) 17 Vacuum ejector Air consumption [L/min(ANR)] note4) 57 Supply pressure range [MPa] 0.3 to 0.55 Standard supply pressure [MPa] note5) 0.5 Valve Model V114 Model ZSE20-*-*-M5-A1 Rated pressure range [kPa] 0 to -101

IDX-OM-W019

CMay. 2021 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

IDX-OM-W020

] 17.8 0.5 IDFB4E 1/2 [453] 17.8 [13] 11.1 10.8 [453] 1.2 [283] 3.1 [275] 10.8 17.9 10.6 1.7 9.1 1.3 0.6 9.4 3.1 IDFB6E [455] 0.6 [270] [31] [42] [80] [230] [32] [15] [240] [80] [275] 3/4 [15] IDFB8E 19.1 22.4 14.0 11.8 [300] IDFB11E [485] [568] [355] IDFB15E 1 11.8 23.7 22.8 1.6 2.1 16.6 3.4 10.2 1.7 0.6 10.6 4.0 15 12.4 0.6 [300] [603] [578] [41] [54] [396] [87] [258] [43] [15] [270] [101

Line Filter

Work step 1) Remove the bowl assembly by referring to the section [101. Bowl assembly Replacement] (P16). Disassembly AFF50 AFF60 2) Install the replacing element and bowl seal in the bowl assembly. Mount the bowl assembly by referring to the section [10-1. Bowl assembly Replacement] (P16). Assembly Bowl seal Element Bowl assembly -17- 11.

Mist Separator

Work step 1) Remove the bowl assembly by referring to the section [101. Bowl assembly Replacement] (P16). Disassembly AM50 AM60 2) Install the replacing element and bowl seal in the bowl assembly. Mount the bowl assembly by referring to the section [10-1. Bowl assembly Replacement] (P16). Assembly Bowl seal Element Bowl assembly -17- 11.

Micro Mist Separator

Work step 1) Remove the bowl assembly by referring to the section [101. Bowl assembly Replacement] (P16). Disassembly AMD50 AMD60 2) Install the replacing element and bowl seal in the bowl assembly. Mount the bowl assembly by referring to the section [10-1. Bowl assembly Replacement] (P16). Assembly Bowl seal Element Bowl assembly -17- 11.

Clean Gas Filter

The element replacement procedure for SFA can be downloaded via the SMC website. -9- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -10-

PSxx-OMR0001CN

5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

PSxx-OMT0001CN

5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?