Vacuum System Peripherals:

H L Option Pressure gauge Combinations R: Rear pressure gauge mounting Standard specification Valid combination Invalid combination Pressure gauge VAC (Vacuum pump side) SET (Pad side) Applicable model Specifications Symbol L H O S C U K IRV2000 IRV3000 IRV1000 P SMC Connection Rc 1/8 01 Connection Rc 1/4 02 Standard specifications Connection Rc 3/8 03 Accessory Connection Rc 1/2 04

Hand Valve Series VH

Flow direction 2(A) Flow direction 4(B) Flow direction 2(A) Flow direction 4(B) 90 45 45 Rc3/4: 185(10.2) 1 2 9.7 VH6 VH600-06, 10 3 (Closed center) 3/4, 1 Rc1: 194(10.5) 3 4 3.6-6 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R Standard (Opposite to handle side) Handle side Body size (Base size) Port size (nominal size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base 02 03 04

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

How to Order 100 04 B ZFC With bracket (Standard) Air suction filter in-line type with One-touch fittings IN/OUT applicable tubing O.D.

-fl Seies

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

Base Mounted Wiring: 01FU (Plug-in w/D-Sub Connector on U Side), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 03 (3/8), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 9 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 6 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 03 (3/8), Thread: N (NPT)

"MFLD, VFS, 4/5 PORT SOLENOID VALVE

"MFLD, VFS, 4/5 PORT SOLENOID VALVE

"MFLD, VFS, 4/5 PORT SOLENOID VALVE, N lb

Base Mounted Wiring: 01FU (Plug-in w/D-Sub Connector on U Side), Stations: 8 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Base Mounted Wiring: 01SU (Base Mounted Plug-in for Serial Transmission), Stations: 6 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 6 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT)