VQ5000

Manifold Stations and Effective area mm (Cv factor) for Individual Operation Type 10 stations 5 stations 1 station Passage/Stations P A or B 59.4 (3.30) 60.3 (3.35) 60.7 (3.37) 2 position metal seal VQ5 00 1 2 A R1, BR2 74.7 (4.15) 74.7 (4.15) 74.7 (4.15) P A or B 66.6 (3.70) 67.0 (3.72) 67.7 (3.76) 2 position rubber seal VQ5 01 1 2 A R1, B R2 80.1 (4.45) 80.1 (4.45) 80.1 (4.45) Note) For

Stations: 12 Stations, Piping: 1 (P Common, R Common, A Side)

Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Request to read Address BCC data End code Identification code Start code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address Start code BCC data Affirmation code End code Numerical data Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

ISO Cylinder

10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 20 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 92.5 (98.5) 10 64.5 (68.5) 92.5 (96.5) 12 70 (73.5) 108 (111.5) 16 69 (72.5) 95 (98.5) 121

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-6

VP4

exhaust center Closed center Exhaust center Silencer (AN101-01) Component Parts No.

S

Selector VM-34AR Red Twist Selector VM-34AB Black Twist Selector VM-34AG Green Key Selector VM-36A A C T U AT O R 00 Basic Type 01 Roller Lever 02 One Way Trip 05 Straight Plunger 06 Roller Plunger 07 Cross Roller Plunger 08 Toggle 30 Push ButtonMushroom Push ButtonMushroom Lock Down (Red only) order Valve VM430-01-00 plus Actuator Type XT34 32 Push ButtonExtended 33 Push ButtonFlush 34

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

•

Pressure set1ing range -1 OOkPa . l DOkPa {1.D2kgf/cm2 } 0. 1 MPa1MPa {1 O.2kgf/cm2} (MPa. kPa, kgf/cm2, mmHg. bar, PSI) mmHg, kPa, PSI MPa, PSI Unit indicalions kgf/cm:i, bar kgf/cm2, bar -Variety of switch output modes MPa:O.01. PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

SMC

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

ZSM1-115/121

ZSM1-121 Connection example with PLC In the case of common terminal is negative LED Brown ( + ) Brown Resistance Reed switch Main circuit of switch Black ( ) ZSE ISE PLC Input terminal Zener diode ZSP () Blue Blue PS COM ISA PSE + IS ISG Dimensions ZSM 23 10 15 ZSM1-115 ZSM1-121 Pressure adjusting screw 52.5 500 Indicator light Indicator light R 1/8 871 Series ZSM1-115/121 Specific Product

Compact Vacuum Ejector Series ZA

02 Symbol 0 2 3 5 6 P Applicable tubing O.D.

Refrigerated Thermo-chiller

Alarm code Alarm message Operation status Main reason 01 Liquid deposits in the base of this unit.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Manifold Stations and Effective area mm (Cv factor) for Individual Operation Type 10 stations 5 stations 1 station Passage/Stations P A or B 59.4 (3.30) 60.3 (3.35) 60.7 (3.37) 2 position metal seal VQ5 00 1 2 A R1, BR2 74.7 (4.15) 74.7 (4.15) 74.7 (4.15) P A or B 66.6 (3.70) 67.0 (3.72) 67.7 (3.76) 2 position rubber seal VQ5 01 1 2 A R1, B R2 80.1 (4.45) 80.1 (4.45) 80.1 (4.45) Note) For

CXS

0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99 144 198 CXSJM10 159 136 121