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Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDF100F~150F-W Revision Rev CSeptember,2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights

3.1 INOUT R INOUT 3.2 ONON IN OUT 5 IDF100150F-W 3.1 3 1 IDX-OM-Z004 3 ONOFF 0.05MPa 3.3 OFF OFF 3.4 3 3 5 3.5 OFF IDF100150F-W 3.3 3 2 IDX-OM-Z004 3 3.6 0 1 0 1 0 1 2 3 2 3 4 5 4 5 6 7 6 7 2 3 4 5 6 7 0 1 3 4 5 OFF OFF5.2 3 3 IDF100150F-W 3.6 3 3 IDX-OM-Z004 3 3.7 2A 80VA 100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02

In most cases, cooling performance of the water-cooled condenser is deteriorated by the contamination of the cooling water of adhesion of scales. (2) Cooling Water Quality Standard 1 Water quality standard As a guideline for cooling water quality which does not cause abnormal level of contamination or scale, JRA-GL-02-1994 Guideline of Water Quality for Refrigeration and Air Conditioning

Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2022 SMC Corporation All Rights Reserved No.PS-OMT0002-E

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: w/o Lead Wire, Bracket: Bracket C, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual:

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter,