AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

IR1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8.5 M6 x P0.5 5.5 71 11 18 123 44 51 90 10 9.5 IR VEX Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 AMR OUT(2) SUP(1) 10 43 35 EXH ITV 2-Rc 1/8 Port size 2-Rc 1/4 Port size Rc 1/8 Pressure gauge port 43 50 50 35 2-Rc 1/8 Pressure gauge port 60 IC VBA IR300-

ISE70/75/75H

port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 16-2-51

ZSP1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 17-5-51 10 Series LVD Dimensions Basic type A D L K 4-M (Q) 2-P one-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Breathing port PB H C PA G

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VCS

. + 3 stns x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry J E H C G B D Z A Grommet: G Conduit: C Conduit terminal: T Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

port (Individual SUP type) (mm) n (stations) Model Dimension 2 10 3 4 5 6 7 8 9 374 388 476 494 L1 L2 L1 L2 86 100 108 126 122 136 154 172 158 172 200 218 194 208 246 264 230 244 292 310 266 280 338 356 302 316 384 402 338 352 430 448 VVX21 VVX22 VVX23 (mm) Grommet Conduit DIN terminal Electrical entry Conduit terminal (B) Individual SUP type A B C D E F H J K M N Model Q 49 58 63 R S 42 51

70pvvna

this case, pilot solenoid valve is VO307-DZ. 17-4-6 3 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Weight (kg) Orifice size (mm) Air operated Model Port size Rc Cv Av x 10-5 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25 41 51

VNH

A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51

VVX31/32/33

Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN Blanking plate LVC LVA Mounting hole Pitch n-Rc , 4 1 8 1 LVH LVD LVQ Stations Symbol 2 96 84 126 108 3 132 120 172 154 4 168 156 218 200 5 204 192 264 246 6 240 228 310 292 7 276 264 356 338 8 312 300 402 384 9 348 336 448 430 10 384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51

VXD21/22/23

www.stevenengineering.com Port size Mounting hole DIN terminal: D Conduit terminal: T Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51

3 Port Solenoid Valve

SUP) port 16.5 5.5 14.5 11.5 6 0.1 W with power saving circuit 1 3 9.5 13.1 16.5 150 (lead wire AWG#26) 5 26.5 31.5 3.5 150 (lead wire AWG#26) 33 3.5 2-3.4 Mounting hole P = 7.2 4 7.1 L2 L1 n U side 1 2 3 4 5 D side (11.5) 9.5 5 Dimensions Formulas: L1 = n 7.2+ 7, L2 = n 7.2 + 15, n: Stations (maximum 20 stations) n L 12 93.4 101.4 19 143.8 151.8 2 21.4 29.4 3 28.6 36.6 4 35.8 43.8 5 43 51

SYJA3000

Port size Effective area (mm2 ) (Cv) Weight (2) (g) 22 2 position single SYJA3120-M3 Body ported 5 port base mounted (With sub-plate) 25 2 position double SYJA3220-M3 0.9 (0.05) 3 position closed center SYJA3320-M3 M3 X 0.5 M3 X 0.5 3 position exhaust center SYJA3420-M3 28 3 position pressure center SYJA3520-M3 2 position single SYJA3140-M5 48(22) Base mounted 2 position double SYJA3240-M5 51

SZ3000

Series for SZ3000(8) Model AN203-KM8 Effective sectional area 14mm B 26 C 51 A 16 SZ3000-114-2A Indicator stickers for blocking disk Plugs (White) These stickers are to be put on valves in which SUP and EXH blocking disk have been installed so that confirmation is possible from the outside. (3pcs. of each are included.)

Series VCL

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CL4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 6 Direct Operated 2 Port for

Series VCS

Dimensions (mm) Electrical entry Conduit terminal: T Grommet: G Conduit: C B C D E G H J Z A Model Q R S T N X Y VV2CS2 22 50.5 44 41.5 66 99 77 49 20 24.5 28 4.5 38 17.3 34.5 56 VV2CS3 24 60 45.5 51 68 101 86.5 57 25.5 28.5 30 5.5 42 19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 6 Direct Operated 2 Port for Steam Series VCS VCS (for steam) 2 port solenoid

VEX1

solenoid: VEX3421 Internal pilot solenoid: VEX3422 DlN connector (D) 5.1-21 VEX3 Body ported/VEX350/370 Air operated: VEX3500/3700 External pilot solenoid: VEX3501/3701 Internal pilot solenoid: VEX3502/3702 VEX370 VEX350 VEX AN AMC Dimensions R port Port size B C D E F G H J K L M N O A Model P, A port Rc(PT) 107 VEX350 1 2 3 4 123 96 112 26 30 70 90 50 60 25 30 10 15 25 25 80 100 46 60 45 51

VHS

VHS2500 VHS3500 VHS4500 VHS5500 Model 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 1 1(P)/2(A) Piping port 1/2 1/4 1/8 3/8 3(R) 110 (6.11) 130 (7.22) 16 (0.89) 31 (1.72) 10 (0.56) 14 (0.78) 22 (1.22) 38 (2.11) 57 (3.17) 1(P) 2(A) Effective area (mm2) (Cv) 2(A) 3(R) Combination with a modular style FRL is possible. 33 (1.83) 40 (2.22) 14 (0.78) 29 (1.61) 11 (0.61) 16 (0.89) 15 (0.83) 29 (1.61) 51 (2.83

VM

Push Button (Flush)/VFM350-02-33 Panel mounted hole JlSL JIS Symbol 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T. 3.5-51 VFM300 Series VFM300 Twist Selector (2 position)/VFM350-02-34R, B, G, Y Panel mounted hole SlA JIS Symbol VlA SlA VlA 23N F.O.F. 0.5MPa supply VM/VR 90 T.T.