VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

4/5 Port Air Operated Valve SYJA3000 Series

SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

LEF-OM006xx

20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

NCA1

LR DD E R F M FL Dimensions Part No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Body Size: 40, Thread: Rc, Port Size: 3/8, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red

Body Size: 40, Thread: G, Port Size: 1/2, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red

Body Size: 40, Thread: Rc, Port Size: 1/2, Handle/Bonnet Material: Aluminum, Options: w/Bracket, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red

Body Size: 40, Thread: G, Port Size: 1/2, Handle/Bonnet Material: Aluminum, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red

Body Size: 40, Thread: Rc, Port Size: 03 (3/8), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Handle/Bonnet Material: B (Aluminum), Options: B (w/Bracket), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Handle/Bonnet Material: B (Aluminum), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Handle/Bonnet Material: A (Flame Resistant PBT), Options: B (w/Bracket), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: Rc, Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: R (Flow Direction: Right to Left), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 06 (3/4), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: R (Flow Direction: Right to Left), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: Resin, Flow Direction: R (Flow Direction: Right to Left), Unit: Unit of Product Label: MPa