EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

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43-10-01 Signal Pressure G 43-2-01 Consult factory regarding Repair Manual SMC Pneumatics, Inc. 3011 N.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

3-Position Rotary Table

10 10 90 42 27 45 31 49 190 10 10 80 35 35 62 39 66 190 10 10 65 30 39 68 43 72 190 10 10 50 24 49 83 53 87 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

VQ7-6/7-8

8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.

VXH

(mm) Port size Weight (g) Max.system pressure (MPa) Note) VXD Water Air Oil 3 1 4 3 8 1 2 2.0 2.3 2.3 2.0 550 550 630 0.35 0.30 0.30 10 0.05 2.0 2.0 1.5 1.6 2.0 2.0 8.5 9.5 9.5 1.9 2.4 2.4 VXZ VXS Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal, 60 g for conduit terminal type respectively.

EXxx-OMN0029CN

V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585%RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 170 g 175 g 1 EX600-ED2-31No.EX-OMN0029CN-D EX600-ED3-32No.EX-OMN0029CN-D (DC24 V10%) -33No.EX-OMN0029CN-D LED 0 1 LED Yes No SI 2 3 4 SI ST(M) 5 6 7 SI . -34No.EX-OMN0029CN-D SI 8 ST(M) ST(M) 9 / PWR PWR(V) 10 MSNS 11 12 13 14 -35No.EX-OMN0029CN-D

Fieldbus system Ethernet POWERLINK compatible SI unit

Weight 170 g 175 g 1: All unused connectors must have a seal cap fitted.

IDX-OM-W014

-1 10 1 IDX-OM-W014 10 M 10-2 ADM200 IDU3E6E-10-M IDU3E6E-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A)

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

) Port size 4,2 (A,B) Port Manifold base weight W (g) n: Station W = 36n + 6 W = 43n + 64 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both side.

Manifold Regulator ARM1000/2000 Series

Body size 1 1 station ITV 1000 2000 ARM1000-6A1-01G Port size (OUT side) 10 10 stations IC 01 8 1 Piping Accessory Thread type Symbol IN OUT A1 A2 B1 B2 ITVH Nil N Rc NPT Manifold side Body side Manifold side Body side None (With plug) Nil G Common With pressure gauge ITVX Note 3) When ordering single unit Individual Description Regulator main body ARM2000 ARM2000A 1362213623ARM1000 ARM1000A

Manifold Regulator Modular Type ARM2500/3000 Series

Number of stations 02 2 stations Port size (OUT side) Symbol Port size 02 03 1/4 3/8 Applicable model ARM2500 ARM3000 10 10 stations Thread type Nil Rc F N G NPT Piping ARM3000 Symbol A B Type Common IN Individual IN IN From end plate From OUT port or G port Standard Specifications Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa ARM2500

11-zcuk-e

Grease pack part no.: GR-S-010 (10 g) 63

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

IDX-OM-W026

1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (