AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

axis number selection Control setting switch rotary axis No. setting switch rotary axis No. switch switch 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 4 10 4.

High-precision Digital Pressure Switch ( compatible)

0 Display units, switch output specifications and diagnostic information selection function 27 F 1 Setting of OUT1 29 F 2 Setting of OUT2 32 F 3 Digital filter setting 34 F 4 Auto-preset function 35 F 6 Fine adjustment of display value 37 F10 Sub display setting 38 F11 Display resolution setting 44 F14 Zero cut-off setting 45 F80 Power saving mode 46 F81 Security code 47 F90 Setting of all

CLS

-X BG BE 20l f 15 Data h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A BA BB BC BD BE BG BF BZ BV BW BP D EA FY FZ GA GB GC H K BY AL C E F KA B FA M FD J FT FX 107 145 75 18 145 110 136 115 90 90 90 115 115 140 190 100 230 16 58 110 M14 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59

High-precision Digital Pressure Switch

0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all

High-precision Digital Pressure Switch ( compatible)

0 Display units, switch output specifications and diagnostic information selection function 28 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F14 Zero cut-off setting 46 F80 Power saving mode 47 F81 Security code 48 F90 Setting of all

SMC Pneumatic Clean Series

M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33 11 40 15 M8 x 1.25 27 Up to 1000 51 30 8 27 6 71 14 60 1/4 22 44 16 32 60 9 100 102 165 M14 x 1.5 12 90 50 35 11 50 17 M8 x 1.25

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 4 x M20 x 2.5 4 x M22 x 2.5 20 (3/4B) 0 250 73 330 177 80 57 8.7 108 135 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 80 57 12.2 105 150 4 x M10 x 1.5 18 40 (1 1/2B) 50 (2B) 0 60 448 94 540 354 92 65 18.1 120 160 4 x M12 x 1.75 22 65 (2 1/2B) 25 40 504 119 615 385

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

P Q Supply valve and release valve Supply valve Except nozzle diameter 05 type Note) Switch mounted style is also available. P. 13-4-17 to 13-4-19 13-4-4 4 Series ZM Vacuum Ejector: With Valve and Switch Construction: LZM1-KL-E Precautions Be sure to read before handling.

VEX1

N Port size A Model B C D K N O Q R S T U E F G H I J L M P Port 2 (A),1 (P) Port 3 (R) VEX5510 VEX5511 160 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 x 1 x depth 9 116.5 50 25 10 7 25 173 80 60 98 Center , ,1 25 VEX5710 VEX5711 17 82 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 x 1 x depth 6 136.5 1 4 1 4 1,1 1 Bracket mounting dimensions Grommet

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

PSxx-OMV0003CN

OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -33No.PS-OMV0003CN-G [F 3] 0.01 sec.0.0030.00 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(233033) -34No.PS-OMV0003CN-G [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (36) -35No.PS-OMV0003CN-G () OUT1 SET[AP1 REdY] (OUT1[AP1 REdY]UPDOWN1 OUT2) OUT1 OUT1 OUT1 SET[AP1 RUn] ([AP1 RUn]UPDOWN1 OUT2) OUT2 SET[AP2 REdY] (OUT2

modular-press-e

Contact SMC for psi and F specifications. Note 3) For F.R.L. units, port sizes not in ( ) are for standard application. Note 4) Separate spacers are required for modular unit.

Modular F.R.L. Pressure Control Equipment

Contact SMC for psi and F specifications. Note 3) For F.R.L. units, port sizes not in ( ) are for standard application. Note 4) Separate spacers are required for modular unit.

PSxx-OMV0008CN

23 [H_2] [WH2] (58) SET 25 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -36No.PS-OMV0008CN-E [F 3] 0.0030.00 sec.0.01 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(253336) -37No.PS-OMV0008CN-E [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (39) -38No.PS-OMV0008CN-E OUT1 SET[AP1 REdY] (OUT1[AP1

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

25 4 x M8 x 1.25 Effective thread depth 12 NA CC0.1 ZZ + Stroke S + Stroke W K 25 2 TF TN Nil P (Piping port) R Model L K I D B CC ZZ X W S NA Q V 300.007 0.037 100 12-REA50 M8 x 1.25 32 58 55 180 G1/4 86 52.4 25 110 27.5 176 60 60 Rc1/4 NPT1/4 320.007 0.043 12-REA63 M10 x 1.5 38 65.4 72 26 122 69 34.5 188 70 70 192 Rc1/4 NPT1/4 G1/4 862 A Specific Product Precautions Be sure to read this

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA

Series HAW Water Cooled Aftercooler 1

G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating