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s' i20mh) w'Bool CPA1TN ROD BOOT with Boof BORE B D E J K MM P s dTDeB TT TX TY TZ H z zz h zl 1 3 4 (351 2 7 6 2.O5 152\ o.79 1.57 0 3 9 i10l 067 117\ M8x1.25 0.28 (7\ M16x1.5 1 1 4 (30) 3.54 i90l o 5e 8;tjj (15 3,'* 1 . 1 4 (30) g 7 (95t 2.99 5.31 t135) 2.24 (581 (1031 6.06 (1541 2.05 (521 11.2) 260 (66) s T o 1 1 1 1 6 3 8 1.38 l35l 3 3 5 (85) 2.52 (64) 0.79 (2Ol 1.57 0.39 0.67 t17l 0

HRX-OM-S004

2.3 Function of Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical

HRX-OM-W032

Set temperature 40.0 oC (104.0 oF) (-)2 5.0 to 55.0 oC (41.0 to 131.0 oF) Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3.

AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AMX-OM-L025_e

N ever f ai l t o use dry ai r. D eodori zat i on m ay det eri orat e i f w at er drop i s cont ai ned i n com pressed ai r. N o back f l ow Pl ace w here ai r f l ow s backw ards I N El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L M N o Z SYM BO L o P Q Z I nst al l vert i cal l y.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G E (g6) F (h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 14 1 19.5 29 22 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0 0.043 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 5 12 21.2 18 1.5 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 6 14 1.5 34.5 25 20 42 17 10 0.5

Vacuum Unit Series ZK2

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Type Pressure range [kPa] Specifications Symbol P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T Analog output 1 to 5 V 100 to 100 Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Information

3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

NCRAI seies

ltil q{ry 30 (1 3/16) RailTyps DA7 o NCDBA!8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

HEC-OM-S019

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AMX-OM-L024_e

Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, I m pact Envi ronm ent H i gher t han /M ERI TS 60

Unit Manifold Valve

Description Material Note 1 Solenoid valve Unit assembly 4 mounting screws M2 x 27 L are included. w 2 PCB assembly 3 Cover Resin 4 Base Resin q 5 Plate Aluminum Plate assembly 6 Barb fitting Aluminum r t y 1 (P) 2 (A) 2 (A) 3 (R) Note) As this drawing shows the internal construction, it is different from the actual product. 3 Series VV061 Replacement Parts q Unit assembly Mounting screw

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.