Cylinder with lock

Description Qty Note 1 BRAKE BODY 1 21 SEAL WASHER 1 2 BODY CAP 1 22 HEXAGON SOCKET CAP BOLT 4 3 COLLAR 1 23 ROD COVER 1 4 HOLDER 1 24 HEAD COVER 1 5 BRAKE METAL 1 25 CYLINDER TUBE 1 6 PISTON A 1 26 PISTON ROD 1 7 ROLLER HOLDER 1 27 PISTON B 1 8 ROLLER PLATE 2 28 CUSHION RING 1 9 NEEDLE ROLLER 2 29 CUSHION RING B 1 10 PISTON SPRING 1 30 CUSHION VALVE 2 11 ROLLER SPRING 1 31 RETAINING RING

Digital Flow Switch

[F 1] Setting of OUT1 completed.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Flow Sensor Series PFMV

Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

Digital Flow Switch (Integrated display type)

2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 Flow CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Setting/display flow range 0 to 9 ft3 x10-1 Accumulated flow Min. setting/display unit 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/pulse ft3 x 10-2/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

Vacuum Regulator

1 2 3 43 Description Pressure gauge Gauge nut O-ring R 1/8 23.5 3 breathing port 1 to 3 are assembled before shipment. 39.5 2-Color Display High Precision Digital Pressure Switch Part No.

PROFIBUS DP Compatible Fieldbus System

1.

PF-OMM0004_C

[F 1] OUT1 -28No.PF-OMM0004-D 1. [F 1] [oUt1] 2. ON-OFF -29No.PF-OMM0004-D 3. a. ([n_1]) (33 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (33 ) -30No.PF-OMM0004-D c. / -31No.PF-OMM0004-D ( [n1AH]) ( [n1dH]) 3 1 3 6 6 1 6 3 1 1 -32No.PF-OMM0004-D 4. OUT1 5. [F 1] OUT1 -33No.PF-OMM0004-D -34No.PF-OMM0004-D -35No.PF-OMM0004-D [F 2] OUT2 OUT2 OUT1 1.

IZx-OMR0035

.: IZ-OMR0035 PRODUCT NAME Ionizer MODEL / Series IZF21/31 Series 1 Doc. No.: IZ-OMR0035 Contents Safety Instructions . 3 1. How to Order. 8 1-1. Ionizer . 8 1-2. Accessories. 8 1-3. Option . 10 2. Procedures to Operation . 10 3. Installation and Wiring . 11 3-1 Installation . 11 3-1-1. Precautions for Installation . 11 3-1-2. Installation of Ionizer . 12 3-2. Wiring . 13 3-2-1.

Rotary Table: High Precision Type

M(D)SUA1 P211070-1 M(D)SUA3 P211090-1 M(D)SUA7 P211060-1 M(D)SUA20 P211080-1 *The auto switch unit can be retrofitted on a rotary actuator.

SYJA3000

SYJA3140 1 pc. SYJA3240 1 pc.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Pressure Relief 3 Port Valve With Locking Holes

Reference data. 1 1 - 7.

KS/KX

5.0 8 26 15 15 12.8 24 17 6 28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

The stroke can be set in 1 mm increments.