Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

CLQ

MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YA 03 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 42 50 62 76 6 8 10 12 16 20 25 30 6.5 6.5 8.5 10.5 6.8 9 11 14 18 20 26 31 10 12 16 18 CNA Applicable air cylinder bore CNS 03 05 08 10 32, 40 50, 63 80 100 Mounting

IDG

Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.

Compact Cylinder with Lock Series CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

Series IDG

and 50HM are 03 only.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 18 6.8 16 6 42 6.5 10 MU YA-05 50, 63 20 9 20 8 50 6.5 12 Applicable air cylinder bore YA-08 80 26 11 25 10 62 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 31 14 30 12 76 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

AS-FG/ASD-FG

, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04 NPT1/2 63, 80, 100 AS421FG-N04 Note

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

IR1000/2000/3000

VAC Vacuum pump side Atmosphere 30 AMR 18 50.6 ITV 35 43 2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Digital Flow Switches

NPT G Wiring specification Nil N 3m lead wire with connector Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 PF2A510/550 PF2A511/521 PF2A551 Specifications PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Model Measured fluid Air, Nitrogen Detection type Heater type 20 to 200l/min 50 to 500l/min 1 to 10l/min 5 to

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,