Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10

Environment

to 50 60% to 85% 21 to 50 80% to 95% 800 LEC SS-T Lead 4: LEY32C 700 Lead 8: LEY32B LEY25 1 to 4 20% to 65% LEY25A 1 to 4 40% to 95% 5 to 20 35% to 65% 5 to 20 60% to 95% 21 to 35 50% to 65% 21 to 35 80% to 95% 600 LEC Y Lead 16: LEY32A Force [N] 500 400 Motorless LEY32 1 to 4 20% to 85% 5 to 20 35% to 85% 21 to 30 60% to 85% * The pushing force in the table shows the range within which

RSQ

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 10-8-20 21 21 Stopper Cylinder: Adjustable Mounting Height Series RSG Rod End Configuration: Lever Type with Shock Absorber Basic style: Flange mounting These 2 figures show the piston rod extended.

Modular Type Filter Regulator Series AW

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

Fieldbus system Digital unit

I/O signal assignment (EX600-DM E) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 1 Input 2 Input 3 Input 4 Input 5 Input 6 Input 7 Input signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Pin number 14 15 16 17 18 19 20 21 Signal name Output 0 Output 1 Output 2 Output 3 Output 4 Output 5 Output 6 Output 7 Output signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit

PF2A/PF2W

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

Hydraulic Cylinders

(mm) Rod end male threads a b c e f g h Bore size (mm) 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 86 40 26 30 M20 x 1.5 7 19 40 95 50 31 35 M24 x 1.5 8 24 46 106 63 41 45 M30 x 1.5 9 30 58 125 80 56 60 M39 x 1.5 14 41 77 155 100 71 75 M48 x 1.5 21 50 101 197 7 Series CHKDB Auto Switch Specifications Auto Switches: Proper Mounting Positions and

LEF-OM006xx

1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Escapements Series MIW/MIS

-30D MIS25-30D 6 4 3.5 1.5 16.5 27 4.5 20.5 41 8.5 7.5 38 21 MIS8-10D MIW20-20D MIS25-50D 6 4 4 2 16.5 37 4.5 20.5 31 8.5 8.5 41 29 MIS8-20D MIS20-10D MIW32-32D 6 4 4 2 18.5 31 6.5 20.5 51 8.5 8.5 39 29 MIW12-12D MIS20-20D MIS32-30D 3.5 1.5 4 2 18.5 29 6.5 20.5 61 8.5 8.5 59 29 MIS12-10D MIS20-30D MIS32-50D 3.5 1.5 4 2 18.5 39 6.5 7.5 33 21 Note) Adjust the auto switch

Digital Flow Switches, Series PF2A, Series PF2W

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

High Vacuum Angle Valve

Refer to Maintenance Parts on page 6 for further details regarding quantity and type.

Thermo-chiller

6 !2 x 4 !3 w Parts List (170) No.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-06SK 17 25.2 18.4 34 6 12.8 37 42.6 14 R 1/4 14 41.2 46.2 47.2 52.2 18.5 AS231FE-02-08SK 12.9 18.5 28.2 18.3 35.2 8 15.2 39 45.6 AS231FE-02-10SK 21 31 20.2 38.7 10 18.5 42 48.4 AS331FE-03-06SK 17 25.2 38.5 6 12.8 57 46.1 20.6 12.9 AS331FE-03-08SK 18.5 28.2 39.7 8 15.2 60 49.1 14 R 3/8 19 46.5 51.5 52.8 57.8 23 AS331FE-03-10SK 21 32.6 43.7 10 18.5 62 53.5 23 16.2 AS331FE-03-12SK 22 34.4 44.9

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

8 10 12 12 10 6 8 10 Tubing O.D.

Electric Slide Table / High Precision Type 《 AC servo motor 》

LESYH series electric slide table / Common precautions . 21 3.1 Design / selection. 21 3.2 Handling . 21 3.3 Precaution on maintenance . 23 4. Troubleshooting . 24 -1- LESYH Series / Electric Slide table Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

IP8001 Series

No.IP8S-OM09 45 (430) Operation setting*21 Set stroke for 0% and 100% of input signal by operating the actuator.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.