ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Air Suction Filter With One-touch Fittings Series ZFB 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 16 1 4 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 20 22 20 22 30 30 75 40 100 62 1 4 Metric size(2) 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZM With valve 07 5 K E15 LZ 1 S A H L Supply valve, Release valve ZM 07 H 2 E15 L Without valve Vacuum switch electrical entry Nozzle diameter Nil L Grommet type, with 0.6 m lead wire Grommet type, with 3 m lead wire C Connector type, with 0.6 m lead

ASP

L6 T2 A1 H1 L5 A3 T1 A2 Applicable A1 A2 A3 D1 D2 H H1 L1 L2 L3 L4 L5 L6 M T T1 T2 tubing Model number diameter d 6mm ASP330F-U01-06-X352 ASP330F-U01-07-X352 ASP430F-U02-07-X352 ASP430F-U02-08-X352 ASP530F-U03-10-X352 ASP530F-U03-11-X352 ASP630F-U04-12-X352 ASP630F-U04-13-X352 45.7 9.4 16.1 11.6 45.5 51.1 1/8 Uni G 1/8 14.2 14 29.3 14 13.7 38.4 22.9 26.9 34.6 to 39.6 1/4 1/4 63.6 10.4 23

VR4151/4152

1/4" 13.2 13.2 54.4 7.1 36.2 25.6 16.8 16.8 23.5 22.5 VR1210F-09 5/16" 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1220F-07 1/4" 13.2 13.2 59 7.4 37.9 25.6 16.8 16.8 31.4 23.9 19.8 VR1220F-09 5/16" 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-11 3/8" 17.9 18.5 69.8 9.5 25.8 44.5 31 20.8 20.8 53.0 5-7-6 Transmitters: AND Valve with One-touch Fittings VR1211F Model Relay valves for

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

AS

AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 AS-32B AS-33B AS-34B AS-35B AS-34B AS-31B AS-33B AS-36B AS-32B AS-37B AS-38B M3 M3 AS-36B AS-34B 4 4 AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 M4 4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2

Vacuum Unit Series ZK2

ZK2 07 Without option B 10 09 Bracket P to N C to N Use when a single unit is mounted to the floor in an upright position is requested.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

212

Applicable model LVR20 LVR40 LVR50 06 6 x 4 LVR20 LVR40 LVR50 07 1/4" x 5/32" 12 12 x 10 11 3/8" x 1/4" 19 19 x 16 13 1/2" x 3/8" 19 3/4" x 5/8" : Basic size : With reducer 07 LVR 2 0 T Tube extensions Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 Tubing size Tube extensions Metric size Inch size Symbol Tubing size Applicable model Symbol Tubing O.D.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

11.4 52.2 6.2 25.2 53 47.6 16.5 6 12.8 AS2051F-07-3 AS3001F-08-3 64.4 8.2 32.1 60.9 55.5 18 15.5 1/4" 13.2 54.4 7.1 26 53.8 48.4 17 15.2 8 3.5 17 13 21 18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

MNB

10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.