Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Width across flats 3 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail

Rotary Table Series MSU

x 0.8 (10-32 nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

Speed Controller: Standard Type Series AS In-line Type 1

1 14143 14144 14147 Stainless steel NBR 15-9-30 4 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Low-Speed Rotary Actuator

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.

MHx-OMU0057

E= Assy E 17 - 32,40 / / / / 11 1 12 2 13 3 14 C 4 15 A 5 16 6 17 NO 7 18 NC 8 19 NBR 9 20 NBR 10 21 NBR MHZ2-32 MHZ2-40 MHZ32-PS MHZ40-PS 19,20,21 MHZ2MHZ-A3202 MHZ-A4002 MHZ2-1 MHZ-A3202-1 MHZ-A4002-1 4,5,6,11,13 Ass'y MHZ2-2 MHZ-A3202-2 MHZ-A4002-2 MHZ2-3 MHZ-A3202-3 MHZ-A4002-3 MHZ2-D MHZ-A3203 MHZ-A4003 2,9,10,12 MHZ2-S MHZ-A3203S MHZ-A4003S MHZ2-C Ass'y Ass'y

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

IZx-OMR0035

Function . 17 4-1. Name of Parts. 17 4-2. Adjustment of Offset Voltage . 17 4-3. Adjustment of Air Flow . 18 4-4. Emitter Dirt Detection and Cleaning. 19 4-4-1. Manual Cleaning . 19 4-4-2. Emitter Cleaning with an Automatic Cleaning Unit (Option) . 20 4-4-3. Automatic Cleaning Unit Assembly . 21 4-4-4. Replacement of Cleaning Arm . 22 4-5. Replacement of Emitter Cartridge . 23 4-6.

CXT

22 122 17 2 127 32.5 11 5.5 * PA dimension is the center sorted factor of the L dimension.

AN

valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C Effective area (mm2) Weight (g) Dimensions (mm) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86) A B PB 50 62 (72) 75 (86) 14 2 4 1/8-2 port 12, 14 port Manual override 18 (20) (20) 18 PA R1 P R2 44 (58) 44 (58) 3/8, 1/2, 3/4-5 port 1,4, 2, 5

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Metering Valve with Silencer Series ASN2 1

1 Metering Valve with Silencer Series ASN2 Superior sound reducing performance Over 20 dB at max. flow rate Cylinder speed easily set Shape of needle is the same as that of speed controller Retainer prevents accidental loss of needle Model Model Port size Effective area (mm 2) Weight (g) ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 M5 x 0.8 10-32 UNF 1.8 1.8 3.6 6.5 16.6 24.5 5 5 17

EX510

Thread piping 2 4 6 M3 M5 SJ2000 SJ3000 0.36 0.56 25 32 SZ Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 5/32" 1/4" M5 SZ3000 0.77 32 SY Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative

Digital Gap Checker

When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.