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M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460 to 480 1 x 14 mm2 VAC HRSH250-A-40HRSH250-W-40HRSH300-A-40(1 x AWG6

M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit: torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 3-1 Required screws Caution All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). -13No.EX##-OMU0020-A 3.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.

Note) If T slots on the bottom in used for installation, select screw which enables only Installation of actuator (Using the mounting holes from the top) A A Model Bolt Max. tightening [mm] torque [Nm] [mm] LEMB M5 3.0 5.5 24.5 LEMC25 LEMH25 M3 0.63 3.4 23.7 LEMC32 LEMH32 M5 3.0 5.5 30.1 LEMHT25 M5 3.0 5.5 21.6 LEMHT32 M8 12.5 9 26.9 Installation of actuator (Using the nuts from the bottom

M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46

No.PS-OMS0007-H PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20(F) ISE20 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Piping 16 Wiring 18 Outline of Settings [Measurement mode] 20 Pressure Setting 21 3 Step Setting Mode 22 Simple

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 17 15 3 10 14 27 11 5 12 19 9 12 14 1 11 27 4 2 6 15 4 43 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (19).

12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

/O.D. mm Model L 5/8 21.4 14 14 36.1 12.7 13.7 4.5 KK3P-50N 1/8 6/9 38.8 18.3 5.4 -60N 18.4 17 39.9 16.5 6.5/10 35.9 21.9 5.9 -65N 14 43.9 13.7 5/8 34.7 17 12.7 4.5 KK4P-50N 6/9 48.4 18.3 5.4 -60N 17 46.7 16.5 1/4 6.5/10 45.1 21.9 5.9 -65N 25.2 8/12 53.2 34.4 7.4 -80N 47.6 55.6 38.2 8.5/12.5 7.8 -85N 19 17.4 19 60.5 34.4 8/12 7.4 KK6P-80N 53.4 1/2 62.8 38.2 8.5/12.5 7.8 -85N 31 24 57.2 20.1

AL31 Contact input signal 1 detection(Refer toTable 5.16-14) Operation: When this alarm signal is output, user can choose to stop/continue operation, or not to detect this alarm. "Operation continue" is default setting.

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

(o) 3.1 0 (88) 14 56 (130) 13 88 (1 10) 16.35 (180 (a w" 'Air (Lubricated) Any non-flammable, non-toxic, non-corrosive gases except oxygen Liquid Oil or non-corrosive liquids within specitied pressures SMC Mechanical Valves have been designed to meet gcnera{ iMustrial standards and are capable of long, trouble{ree life under stringent operating conditions.