HRX-OM-X027

Weight*11 kg 69 *1 Use the product in conditions where freezing will not occur.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

HRX-OM-R016

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit Pressure unit can be changed.

HRX-OM-W038

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

27 17 84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 20 Not included for Option Z (Removed parts) 21 Not included for Options Z and Z1 (Removed parts) 11 1 No condensation should be present.

Thermo-chiller

No anchor bolt is included. *10 Weight when the circulating fluid is not included. *11 The capacity is 60 Hz even in the 50 Hz area when option C is selected. *12 The capacity is 60 Hz even in the 50 Hz area when option P is selected. *13 The weight will increase by 4 kg when option C and P is selected. 11 A Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Scheduled to acquire

A_HEC-OM-K001

<9> Overload judging time setting Sets time for judgment of overload <10> Output ratio indication Indicates output ratio of controller <11> Temp. upper/lower limit alarm sequence setting Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

Voltage Monitor for PFMV5

Part number Description Remarks ZS-28-A Power and output lead wire and connector Length: 2 m ZS-28-B Bracket Mounting screw (M3 x 5 L) 2 pcs. ZS-28-C Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs.

ZSE F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98 Nm or less.

IDX-OM-U021

P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3

VQZ100V-OMT0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ()ISO VG32 (MSDS) [ [ [ [ ] ] ] ] 1 ()ISO VG32 2 ()ISO VG32 (MSDS) 6 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / , ( ( ( ( ) ) ) ) 5m ( ( ( ( ) ) ) ) 3 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VQZ100V-OMT0001 VQZ Series/ / / / L L L L /M /M /M /M ()() VQZ100 VQZ100 VQZ100

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

HRX-OM-Z002

Refer to Table 5-11. Make a selection with the [] [] keys and press the [SEL] key to apply the setting.