3

p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]

HRL

130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating fluid system

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

AR20-B to AR60-B

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator Series ARJ210

Miniature Regulator Series ARJ210 Lightweight body made of aluminum (60 g) Standard Specifications ARJ210-M5 Model 1/8 (Male thread), M5 x 0.8 (Female thread) IN side Two styles of piping connections provided for the IN side: 1/8 (male thread) and M5 (female thread) Port size M5 x 0.8 (Female thread 2 pcs.)

Low-Speed Rotary Actuator

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

Flow Sensor Series PFMV

(mm) Type Port size Model Type Port size Model KQ2H04-M5 KJH04-M5 Male connector Male connector 4 M5 x 0.8 KQ2S04-M5 4 M5 x 0.8 KJS04-M5 Hex. socket head male connector Hex. socket head male connector KQ2L04-M5 KJL04-M5 Male elbow Male elbow Miniature Fitting/Series M Tubing O.D.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

FILTER REGULATOR

Recommended tightening torque: M5 added. Round type pressure gauge Applicable tool size correction. '18.3 C Added note of "piping". Corrected tightening torque.(Diaphragm assembly, square embedded pressure gauge, pressure gauge adapter and blanking plate.)

FILTER REGULATOR

Recommended tightening torque: M5 added. Round type pressure gauge Applicable tool size correction. '18.3 B Added note of "piping". Corrected tightening torque.

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

Single Axis Electric Actuator Series LJ1H

load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 4 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101NB Scale: 15% 10 6 Work piece mounting reference plane LJ1 80 5H10 depth 8 8-M5

ChemicalThermo-con

DC cable 16.4 ft (5 m) Alarm output connector 4.3 (110) Signal cable 16 ft (5 m) 4.1 (103) 2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak

Smooth Vent Valve

x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port

Manifold Type: 41 (Base Mounted), Valve Stations: 16 Stations, A, B Port: M5 (M5X0.8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M5 (M5X0.8)