XL-OMV0002

3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41

XLF Series

Place the O-ring on the O-ring mounting surface. 13 XL*-OMJ0003-D Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface.

VNH

1 ISO VG32, if lubricated.) 5.5 MPa 10.5 MPa Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice size (mm) Flow characteristics Av x 10-5 VDW 5 to 50C 20 times/min Vertical upwards VQ Rc 1 2 Rc 3 8 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 VX2 7.1 86 8.7 110 10.6 190 14.3 15 3.9 29 5.2 38 6.2 58 7.3 54 8 75 9.5 140 13

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 13 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 13 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Manifold Type: 41 (Base Mounted), Valve Stations: 13 Stations, A, B Port: M5 (M5X0.8)

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

High Pressure Coolant Valve

Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice diameter (mm) Flow rate characteristics Kv Conversion Cv Pilot port size Weight (kg) Face-to-face dimension (mm) 5.5 MPa 10.5 MPa 5 to 50C Note 1) 20 times/min Vertical upwards 1 2 3 8 3 4 1 3 8 1 2 3 4 1 3 8 1 2 3 4 1 7.1 8.7 10.6 14.3 3.9 5.2 6.2 7.3 8 9.5 13 15.7 1.9 3.6 4.5 7.8 0.6

LEC-OM069xx

DISCONNECT 13 Turn the control and main circuit power supplies.

Refrigerated Air Dryers Series IDF/IDU

AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 67 Series

C76

13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating tension and compression power kgf (KN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9 13 0.5 0.75 250 (2.5) 440 (4.4) 6-10-41 42 Series C76R Auto Switch

C76

13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating tension and compression power kgf (KN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9 13 0.5 0.75 250 (2.5) 440 (4.4) 6-10-41 42 Series C76R Auto Switch

VZ5000

Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

25

-580 IZS4-640 IZS4-820 IZS4-1120 IZS4-1300 IZS4-1600 IZS4-1900 IZS4-2320 IZS4-2500 Part no. n 5 6 7 9 10 13 18 21 26 31 38 41 Applicable tube O.D.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 10 mm 10 mm 10 mm 10 mm Model With shims 10 to 13 mm 10 to 13 mm 10 to 13 mm 10 to 13 mm CKQG CLKQG CKQP CLKQP Workpieces to be clamped should not be thicker than those shown in the table. 5. Clamp only the flat side of a workpiece. 6.

Cylinder with Lock Series MNB

40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6 x 1.0 M10 x 1.25 4 88.5 18.3 6 23 37 47 13 6.5 224 234.5 40 27 161 13 8 39.5 1/4 11 M6 x 1.0 M14 x 1.5 4 96.5 19.5 6 23 41.5 51 16.5 9 235 246 50 31.5 183 17 9 47 1/4 15 M8 x 1.25 M18 x 1.5 5 111.2 22.4 7 30 47.5 58 20 10.5 271 286

C95

54 19.5 22 G 1/8 7.5 46 97 45.5 12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Vcc GND A A B B Brown Black Red Black Orange Black Connector B terminal no.

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.