Escapements Series MIW/MIS

6 18 15 17.5 26 5 5 M6 x 1 M5 x 0.8 M3 x 0.5 14 26 6 2.8 25 10 7 15 12 8 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 28 14 10 20 14 12 25 25 8 40 6 14.5 2.5 M10 x 1.5 M4 x 0.7 20.4 39 Rc1/8 34 12 12 15 25 11 RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD Model 2 5.7 7 6 12.5 4 8.5 18.6

High Vacuum Angle Valve, XL Series

alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating

Auto Switch Guide

, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 20M5 x 0.8 x 20 Data M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head

Low Profile Air Gripper Series MHF2

20 122 464 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D 38 5H9+0.030 0 depth 4 5H9 +0.030 0 depth 4 2 x M6 x 1 thread depth 15 6 71 6 (Mounting thread) 62 86 2 x M6 x 1 thread depth 6 33 56 M5 x 0.8 Finger closing port (Mounting thread) E 13 25 25 30 41 E MHZ 2 x 5.2 through (Mounting hole) 0 0.1 32 31 31 MHF M5 x 0.8 2 x 10 1.2 1.2 Finger opening port MHL E-E Close: 0 +0.1 0

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

VZ100/300/500

Porting specifications Location Direction 1(P), 3(R) port 2(A) port Valve Top M5 x 0.8 Rc 1 8 Port size M5 x 0.8 Note 1) If there are more than 10 stations, exhaust from both sides of manifold.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264 264 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8

MU

54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke(mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

37.5 32 32 39.5 42.5 5.4 5.4 7 10 6 8 10 12 25 29 36 40 5 5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

3 Port Solenoid Valve Series SYJ300/500/700

connector cable. 5 Series SYJ300 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ34G H -M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

Compact Guide Cylinder

) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

depth 7 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 3.5 through M6 x 1.0 38 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 10 12 4 4 6 15.5 32 + Stroke 20 20 47.5 + Stroke 10 5 29 Lead wire minimum bending radius 10 Auto switch 18 5.5 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) Note 2) M8 x 1.25 2 x 5.4 through

Slider Type/Ball Bushing Bearing

Guide Number of auto switches 10 Bore size (mm) Symbol 15 20 25 32 Nil S n 2 pcs. 1 pc. n pcs. 1 axis 2 axis Nil T Auto switch Bore size Nil Without auto switch (Built-in magnet) 10 15 20 25 32 Port thread type 10 mm 15 mm 20 mm 25 mm 32 mm For the applicable auto switch model, refer to the table below.

Compact Cylinder/Guide Rod Type Series CQM

10 5 15 15 5 2 pcs. 10 10 10 15 15 5 32, 40, 50, 63, 80, 100 1 pc. 10 10 5 5 10 5 15 10 5 15 15 20 15 2 pcs. 10 15 10 5 10 10 15 15 5 15 20 20 15 D-P4DWL type is compatible with bore sizes 40 to 100.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

MHF2

66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (Mounting hole) 32 36 1.2 1.2 36 Finger opening port M5 x 0.8 2-10 +0.1 0 Close: 0 E-E Open: 401 4-M6 x 1 thread depth 6 8-M4 x 0.7 thread depth 4 68 Attachment mounting thread

MHF2

Mounting hole) 32 36 1.2 1.2 36 Finger opening port M5 x 0.8 2-10 +0.1 0 Close: 0 E-E Open: 401 4-M6 x 1 thread depth 6 8-M4 x 0.7 thread depth 4 68 Attachment mounting thread Mounting thread Auto Switch Mounting Groove Dimensions 24 52 2.3 4 2-3H9 +0.025 0 depth 3 6 20 8 20 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 84 12-3-22 23 Series MHF2 Low Profile