High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Compact

q Check the actuator label for model number.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Air Slide Table Series MXP

5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VXA21/22

Refer to table q for configuration.

5 Port Solenoid Valve Series VQZ1000/2000/3000

SZ 75 VP4 39.5 S0700 VQ VQ4 Individual SUP spacer VVQZ1000-P-5-M5 (-Q) (for VQZ1000) VVQZ2000-P-5-01 (-Q) (for VQZ2000) VVQZ3000-P-5-02 (-Q) (for VQZ3000) VQ5 + Rc1/8:VQZ2000 M5:VQZ1000 VQC Rc1/4:VQZ3000 VQZ D Supply port can be installed individually by mounting an individual supply spacer onto the manifold block.

Modular Type Filter Regulator Series AW

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

High Vacuum Angle Valve

With heat-resistant 2-color indicator solid state auto switch Sensor How to Order Amplifier q w e r t y u XL 2 M9NJL A A 40 H4 Heater XLA w Flange size q Series e Indicator/Pilot port direction Rear flange surface Size 25 40 50 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Valve type Shaft seal type A Single acting (N.C.)

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CM2

Construction Construction 1.4-8 Series CM2 Construction Component Parts Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Carbon steel Material Note Note White anodized No. q e r t y u i o !0 !1 No. !2 !3 !4 !5 !6 !

Model Selection 1

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

SZ3000

External power supply 24VDC10% Q DeviceNet compatible: OMRON Corp.

Modular/F.R.L. Units Series AC

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Membrane Air Dryer

0 q q plug y Purge air for dehumidification i plug i Purge r Purge Purge air for dehumidification Component Parts Material Description No. Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.)

MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !