Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Actuator cable type/length Stroke [mm] Robotic cable [m] Stroke Note Nil None R8 87 Size Applicable stroke R1 1.5 RA 107 50 500 16 50,100,150,200,250,300,350,400, R3 3 RB 157 450,500 R5 5 RC 207 50 800 25 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800 Controller 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800, 850,900,950,1000 50 1000 32 Nil Without controller

Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Series VCS

/60Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power VA 50/60Hz Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) In case of low pressure steam at a temperature of 120C or less, use FKM for the seal material.

10

Refer to back page 50 for Safety Instructions and pages 3 to 12 for Common Precautions. Mounting Warning Caution 1. Before performing installation, removal, or stroke adjustment, make sure to cut the power supply to the equipment and verify that the equipment has stopped. 2.

3 Port Solenoid Valve

Series 10-V100 Rubber seal 3 port direct operated solenoid valve Specifications Air Fluid Ambient and fluid temperature (C) 10 to 50 (With no freezing. Refer to page 714.)

OMS0020

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 inputs Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps

IDX-OM-W038

D 5 3-4 IDH Series 52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

/60Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power VA 50/60Hz Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) In case of low pressure steam at a temperature of 120C or less, use FKM for the seal material.

High-precision Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMV0004-H Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

Slit Valve

CAUTION 236 46 Cassette type Full MESK 49 532 Slit Valve XGT Series Dimensions Cassette type standard/XGT312 440 336 336 60 50 50 50 112 377 244 59 Valve seat side (XGT312, 313, and 311 common) Cassette type half MESK/XGT313 60 405 45 36 XLA XL 59 XLQ XM XY Non-cassette type/XGT311 D62 50 Opening size XSA 348 336 Opening size XVD XGT XGT 280 97 CYV 59 244 533 XGT Series Made to Order Specifications

HAA

Indoor ID Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source IDG 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz AMG Power consumption (W) Compact size and lightweight Uses minimal

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Single vane Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 90 162 1 25 180 161 90 90 261.5 3 30 180 259.5 90 440 7 50 180 436 10 22.5 90 675 20 60 180 670.5 Positioning pin hole Allowable Load Adjustment bolt (A) Adjustment bolt (B) Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Operation instruction . 44 9.1 Operation instruction overview . 44 (1) Return to origin . 44 (2) The command to drive to the stroke end and the intermediate position . 44 (3) Stop . 44 2 No.JXC-OMU0030-A 9.2 Operating procedure of parallel I/O . 45 (1) Power on Return to origin . 45 (2) Positioning operationDriving to the stroke end and Driving to the intermediate position . 46 (3) Reset

modular-press-e

Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 AD38 AD48 auto drain AD17 AD27 AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50

2/3 Port Valve for Various

LVD LVQ Refer to pages 17-3-50 and 17-3-51 for specifications and models.