Series VS

, 2 SU0 No option 04 1/2 Size 1, 2 SUQW DeviceNet serial interface (Note) 06 3/4 Size 2, 3 10 1 Size 3 TU1 Terminal Box Note: Please ask available protocol to SMC Conduit Port Thread (for terminal box only) Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 07 (ø1/4"), Sealant: S (w/Sealant)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 09 (ø5/16"), Sealant: S (w/Sealant)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8")

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 09 (ø5/16")

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 07 (ø1/4")

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 07 (ø1/4"), Sealant: S (w/Sealant)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 02 (Screw-in Rc 1/4), EXH: 02 (Screw-in Rc 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 02 (Screw-in Rc 1/4), EXH: 02 (Screw-in Rc 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: DN (D + N)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: N (Name Plate)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: FN (F + N)

Stations: 02, A,B Port: 02 (1/4), Thread: N (NPT)

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

How to order HF2BFB 30 02 (1) (2) (3) (4) (5) (2) Symbol Details Body size 30 40 BFA Antibacterial Filter (5m) BFB Antibacterial Filter (0.1m) (1) Filter type BFC Odor Removal Filter BFD Bacteria Removal Filter Nil Rc N NPT (3) Thread type F G 02 1/4 (4) Port size 03 3/8 04 1/2 Nil Flow direction: left to right (5) Semi-standard R Flow direction: right to left 10 5.

Body Size: 30, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 02 (1/4), OUT Port Size: 02 (1/4), Options: G (Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

I

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.