Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 32mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: NPT, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, LED, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 250mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: M9BW--Solid State, 2 color Indication, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: 4 pcs.

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9BW, Lead Wire Length

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

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b s t i t u t e d f o r o n i n l e t s i d e o f m e m l r a n e a i r d r Y e r t o L o w e r a i r t e m p e r a t u r e .

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

ZP

Type/ZPRmF ZPRmFm-(04/06/08)-(B5/B8) y t e r Component Parts w No.

Guard: No, Size of Body: 250, Accessory: -, O-Ring, Gasket Material: NBR, Max.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Modular F.R.L. Units

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Fluoropolymer Piping Equipment

49 58 47 48 16 10 36 22 22 LQ3F63 69 55 56 LQ3F64 94.5 90.2 84 W M (R) Q P N (E, E) H L1, L1 T L2, L2 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension (R): I.D. of JIS flange necessary to mount this product.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

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R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb. F:M5.X O.8 I F:M6 x 1 D E t3 I D." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Applicable tubing O.D.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n