Round Type Hydraulic Cylinder

0.06 0.08 0.12 0.16 Caution 1.

PFxx-OMU0002

Nominal thread size Required torque Port size Width across flats of attachment Rc1NPT1 36 to 38 Nm 1 45 mm Rc1 1/2, NPT1 1/2, Rc2, NPT2 48 to 50 Nm 1 1/2 60 mm 2 70 mm 16 No.PF-OMU0002-D Wiring Connection Connections should only be made with the power supply turned off. Use a separate route for the product wiring and any power or high voltage wiring.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57

IDX-OM-Z004

100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02-1994 2 4.1 IDF100150F-W 4 1 IDX-OM-Z004 4 2 pH [25] 6.58.2 6.08.0 6.88.0 (mS/m) [25] 80 30 40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L)

3 Port Solenoid Valve Series VQ100 1

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

3 Port Solenoid Valve Series VQ100 1

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

3 Port Solenoid Valve Series VQ100

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Compact Hydraulic Cylinder Series CH
KGB

8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88

IDX-OM-P026E

Outlet dew point oC 10 Amount of cooling water (50/60Hz) Note 2) L/min 100 Cooling tower capacity Note 3) RT 10 Cooling water pressure drop (50/60Hz) MPa 0.05 (excluding automatic fluid filling valve) Fluid port size 1 1/4 union Power supply voltage (frequency) Note 4) Refer to Table 1 (50/60Hz) Electric characteristic Power consumption (50/60Hz) Note 5) Refer to Table 1 Running current

3 Port Solenoid Valve Series SYJ300/500/700

N.O. + P. 33 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2R3 (ARR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.1 SYJ500 Push-turn locking lever type DIN terminal 1.2 2R3 (ARR) 1/8 (SYJ500, 700 only) P.15 SYJ700 M8 connector 2.7 2R3 (ARR) 1/8, 1/4 P. 33 Note) All AC voltage models have built-in surge

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

PSE550/300

value may change 1 digit. 2 1 1 mmH2O mmHg Series PSE530 pressure sensors are also applicable.

VQ

rated voltage 1 2 3 4 5 6 9 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

XLG Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

30 30 Load mass: m (kg) Load mass: m (kg) MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 D3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 10 50 100 5 -X Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) Individual -X How to read the graph 1) When the load mass is 70 kg, eccentric distance is 60

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

HEC_001W-E

Table 3-1 Setting of PID No. Problem Setting (1) Check the Heating/Cooling Ratio is 50 or more.If it is less than 50, correct it to 50 or more. 1 It is far from the target temperature (2) If the value of PB range and I Constant is too large, it takes a long time to achieve the target temperature. (1) The value of PB range might be too small. Increase PB range.

Rotary Actuator/Vane Type

1 i o !