Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specications Flow-rate Characteristics Supply pressure

VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration

VFN Series VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration How to Order 3-way solenoid valve configuration (for Single acting actuator) VFN2120N 5B 02 N X36A Left side port operation Right side port operation C-TYPE A-TYPE NAMUR interface 3 port/5 port A 3 port Port #4 on Coil side B 5 port Port #2 on Coil side C 3 port Port #2 on Coil side D 5 port Port #4 on Coil

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

VH

Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180 location change Long handle (Applicable to VH300/400) When specifying more than one option, indicate symbols alphabetically.

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Clean Regulator SRH Series

Clean Regulator SRH Series ARJ AR425 to 935 How to Order ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard ARP OUT IN Washing grade IR-A 0 1 Grade A Grade B Knob Gauge port IR R: R Specification Set pressure Gauge port IRV 0 1 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There is only one gauge port. 0 1 Non-relief Relief SRH SRH Made to

3 Port 3 Position Valve Body Ported VEX3 Series

3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 1 4 02 3 8 03 ARJ 02 VER2000 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type ARP 0 Internal pilot Rc Nil Por

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type Internal pilot External pilot ARP 0 1 Nil Rc Port size F N G NPT T IR Nil Without sub-plate 03 04 06 3 8 1 2 3 4 NPTF IRV VEX1 SRH Note) To order valve with interface

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm R M Note) External pilot 18 mm and 26 mm sizes mixed Note) Refer to pages 27 and 28 for details of option M.

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

VXH

B 0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

ZPT

(mm) Pad type Material ZPT Series Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 Connection 2004 2 x 4 Symbol Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 4010 4 x 10 (Thin section series) 02 04 2 M5 x 0.8 M6 x 1 M8 x 1 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 4 Male thread Female thread

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, "SPEED CONTROLLER, FLOW CONTROL

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CNTL METAL BODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, AX, AS M5 (MISC./OTHER), .03472 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, CX, AS 1/8INCH (MISC./OTHER), .07920 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CNTL METAL BODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, CX, AS 1/8INCH (MISC./OTHER), .07310 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, "SPEED CONTROLLER, FLOW CONTROL

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, AIR SAVING PRESSURE VALVE, AIRLINE EQUIPMENT, ASR METERED QUICK EXHAUST, DB, ASR 1/4INCH STANDARD (PT), .02776 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, AIR SAVING FLOW VALVE, AIRLINE EQUIPMENT, ASQ INLINE QUICK EXHAUST, DB, ASQ 1/4INCH STANDARD (PT), .33550 lb