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Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14 0.14 0.19 0.14 0.48 0.41 0.41 0.48 0.41 0.83 0.65 0.65 0.83 0.65 0.47 0.38 0.38

Vcr le;s ISE4LB~i 26 100kPa Analog outp.J1 1-5V (S%FS.). loadur~rtCe: lkO ISE4LB\\ -65 (1.02kgf/cm2 ) type PNP oumut P NP open collector SOmA ISE4B -~1-25 Positive pressure NPNoutput NPN open coI ector 30V B emA, res w al 'milage" Vor less ISE4B-~1-26 lMPa Analog output '-5VI 5~",fS, I, loadlmpedarx;e: 1kQ ISE4B*~ -65 11 O.2kgf/cm2 ) type PNP I)lJ tput PNP open collector 80mA .. . ' Lead

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Pressure range 0 1 2 3 4 5 Needle rotations 14-3-6 7 Soft Start-up Valve Series AV2000/3000/4000/5000 Working Principle w F.R.L. e AV r B ON OFF q t AU B-B AF 1(P) 2(A) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u IR y VEX AMR 3(R) B ITV IC Working description

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

How to Order Solenoid Valves for Manifold VX31 [For liquid and gas (DC voltage)] 5 VX32 VX33 00 Electrical option Nil S L Z * B & & B % B '& & Electrical entry Model 7 G C D T =%& ><* =%& Orifice size 1 2 3 4 VC 5 6 77 6 6 0 6 Valve/Body 5 ='2 % 7 VDW Rated voltage * % *= % * *3 9= & * *3 1 2 3 4 5 6 7 8 9 ,, 9= 5,'., ?4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.