Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L1 L2 ZFA200 1107 Air Suction Filter With One-touch Fittings Series ZFB Model Recommended air flow (l/min (ANR)) (1) Internal capacity (cm3) Port size (Applicable tubing O.D.)

Parallel Style Air Gripper: Wide Type Series MHL2

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.

Pressure Gauge Guide

Symbol 46 42.5 Outside diameter Indicator light Max. display pressure Symbol 10 1.0 Unit: MPa Without indicator light Nil L2 Neon light (100 VAC/220 VAC) Attachment (Cover ring assembly) L5 LED/24 VDC Connection thread Without cover ring assembly Symbol Specifications Symbol Size Nil 01 R 1 8 Clear cover has no protrusion. (Clear cover is irremovable.)

VVX31/32/33

L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VFRA3000

EX) VV5FR4-10-l1-l VV5FR4-10-l2-l Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs.

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 10 2 44 1.5 56 1.5 88 1.5 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 172 2.0 184 2.0 216 2.0 L2

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

ZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *1 Made to order (Produced upon receipt of order) r Output specification *2 Made to order (Produced upon receipt of order) y Unit specification t Option 1 Symbol OUT1 OUT2 L IO-Link/ NPN/PNP M SI unit only*4 Nil W Lead wire with connector (2 m) Lead wire with connector (2 m) + Connector cover (Silicone rubber) Nil Unit selection function*5 L2 IO-Link/ NPN/PNP NPN/PNP/External input *

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

-X 20m2 m3 Data Moment (Nm) M1 = F1 x L1 F1 F2 M3 = F3 x L3 F3 M2 = F2 x L2 L1 L2 L3 Maximum Load Weight Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

3 Port Solenoid Valve/

Monitoring L Logical operation equipment L1 Logical operation equipment Input signal I Input equipment O Output equipment Input signal I1 Input equipment O1 Output equipment Output signal Output signal Monitoring Cross monitoring Monitoring L2 Logical operation equipment Input signal I2 Input equipment O2 Output equipment OTE Output of test result TE Testing equipment Output signal Output

Pressure Gauge Guide

Symbol 46 42.5 Outside diameter Indicator light Max. display pressure Symbol 10 1.0 Unit: MPa Without indicator light Nil L2 Neon light (100 VAC/220 VAC) Attachment (Cover ring assembly) L5 LED/24 VDC Connection thread Without cover ring assembly Symbol Specifications Symbol Size Nil 01 R 1 8 Clear cover has no protrusion. (Clear cover is irremovable.)

e

M1 = F1 x L1 M2 = F2 x L2 M3 = F3 x L3 F2 F1 F3 LC6m LC6m L1 E-MY2C P.1127 L2 L3 E-MY2H LZm LZm P.1133 E-MY2HT LC3F2 LC3F2 Caution Xm Xm Select the required model by taking into consideration the operating condition specifications and any possible specification changes that may occur during operation.

P

Metric size Inch size M D1 Model number Piping thread Pilot port 6 1/4 3/8 1/2 10 12 8 (5/16) 1/8 Uni-fit ASP330F-U01-X352 G 1/8 L1 T 1/4 Uni-fit ASP430F-U02-X352 G 1/4 3/8 Uni-fit ASP530F-U03-X352 G 3/8 D2 1/2 Uni-fit ASP630F-U04-X352 G 1/2 L2 H Note) Additional models are possible (i.e. thread form/tubing size combinations), please contact your SMC representative for availability.

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

IS3000

LED/24 VDC Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 Note) Micro load type: Not available L2 option. 864

MHL2

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

CYLINDER, L2, 32MM CM2 KIT/ACCESSORY, .17600 lb