CYP

P-80 (D)

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

2-Color Display Digital Pressure Switch Series ISE70/75/75H

DOWN OUT1 U P SET ZS-31-A Bracket Note) Mounting screws are not included.

VDW

3 0.4 0.1 Port size 4 0.2 0.05 Series 200 p p Port size Symbol 300 p p Note 1) Indicates the maximum operating pressure differential of pressure ports 2 and 3.

SI unit for PROFIBUS DP

Designation Description 1 SV24 V +24 V for solenoid valve 2 SV0 V 0 V for solenoid valve 3 SI24 V +24 V for SI unit operation 4 SI0 V 0 V for SI unit operation 5 Unused The M12 connector cable has two types, SPEEDCON compatible and non-compatible.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12 V 12 V Relay, PLC 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit DGrommet A93V A90V A93 A90 100 V Relay, PLC 24 V 12 V 2-wire IC circuit 100 V or less -X Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

VVXA21/22

LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

240

12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water

FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

Air Slide Table

12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

KR

P. 3 KRL KRT KRU P. 4 P. 4 Use to branch line from female thread in both 90 directions. 45 male elbow Union tee Branch Use to pipe in 45 angle direction from female thread. Model in-between of male connector and male elbow. P. 4 KRK KRT KRU P. 5 P. 3 Use to branch line in the same direction from female thread. Use to connect tubes in both 90 directions.

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Wetted Parts: Stainless Steel 316L

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Wetted Parts: Stainless Steel 316L

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m