RHC

Cylinder Series RHC Dimensions: Rear Flange Style 20 to 40 Rc P Rc P NN GA FZ GB Width across flats NF FX 4-FD H1 I MM FW ND NB RE A B NE FY D C REC Effective thread NC E E NA CX B WH 10 FT 10 JD N A K F N JC CY S + Stroke H F ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

IDX-OM-Z004

K 1.6MPa 1.2.4 P 1.2.5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1.2.6 V ON 1.5 OFF 0.5 1.2.7 5 4 1.2 IDF100150F-W 1 2 IDX-OM-Z004 1 1.3 A ( 4) ( 4) Y 3 A 1.3 IDF100150F-W 1 3 IDX-OM-Z004 1 ( 5) ( B 5) Y V IDF100F V IDF125F V IDF150F B 1.3 IDF100150F-W 1 4 IDX-OM-Z004 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3

ZSE2/ISE2

Lead wire: 0.6 m) C W/suction filter (Mounting on ZX unit) M5 x 0.8 0X Connector type (Lead wire: 3 m) CL W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY Without connector Base mounting (Mounting on ZR unit) 0R CN Note) Single mounting type: M5 x 0.8 (female) threaded.

Soft Start-up Valve

With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

IC

0 IC-0(Built-in sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 cores, O.D. 6.8 mm, 1 m length Cable for 4 point switch output 5 cores, O.D. 6 mm, 1 m length q q Pneumatic regulator connection cable 3 cores, O.D. 3.4 mm, 1 m length Cable for external sensor Note 1) Keep

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

LEF-OM002xx

/See 3.3.Step data setting on p.23 3.4.Parameter setting on P .29 /Refer to the LEC controller operation manual. Input the RESET signal. 45 - No.

IDX-OM-W028

T IDU22,37E-30-T IDU55E-30-T GFCI For Option R GFCI Operation Failure For Option R Operation Failure 1 2 3 TB TB MC1 TDR TDR MC1 PRR PRR MC1THR THS MC1 PRR CM MC1 MC2 MC1 FM1 CM TDR FM2 MC1 THP2 THP1 THS MC1 For Option M MC2 FM2 MC2 PRS1 P MC1 TDR TDR PRS2 THR PRR FM1 MC2 P PRS P For Option M SYMBOL DESCRIPTION IDU75E-30-T CM Refrigerating Compressor GFCI For option R Operation Failure

Flow Sensor Series PFMV

(mm) Type Port size Model Type Port size Model KQ2H04-M5 KJH04-M5 Male connector Male connector 4 M5 x 0.8 KQ2S04-M5 4 M5 x 0.8 KJS04-M5 Hex. socket head male connector Hex. socket head male connector KQ2L04-M5 KJL04-M5 Male elbow Male elbow Miniature Fitting/Series M Tubing O.D.

IDX-OM-W029

-30 IDU55E-30 GFCI R R GFCI R GFCI TB TB PRR PRR PRR MC1 THS MC1 CM MC1 CM FM1 M FM2 MC2 FM2 MC2 P PRS FM1 P P IDU75E-30 M For Option R GFCI R GFCI TB CM FM1 () FM2 PRR MC1 MC1THR MC2 C11 CM PRS OLR MC2 PRS1 PRS2 ILS THR THS FM2 THS CM THP1 THP2 OLP1 1 OLP2 1 THP1 FM1 THP2 FM2 OLR PRR THR PRS2 P PRR P TB GFCI MOV M IDU Series 6-4 6 4 IDX-OM-W029 6 6-5 IDU55E,75E IDU55E

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

Positive pressure ISE2 ZSE2 Vacuum Piping specifications Wiring specifications Single mounting R 1/8 Note 2) Grommet type (Lead wire: 0.6 m) 01 Nil Single mounting NPTF 1/8 Note 2) Grommet type (Lead wire: 3 m) T1 L Connector type (Lead wire: 0.6 m) 0X C W/suction filter (Mounting on ZX unit) M5 x 0.8 Connector type (Lead wire: 3 m) W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 249 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

IDX-OM-W025

OLR CM OLP2 C11 FM PRS MOV P For Option M C11 FM PRS M For Option M P IDF55E-30 IDF75E-30 GFCI GFCI For Option R GFCI GFCI For Option R TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP MC1 MC1 MC2 MC2 PRS1 PRS1 P P PRS2 THR PRR PRS2 THR PRR P P For Option M For Option M SYMBOL DESCRIPTION SYMBOL DESCRIPTION SYMBOL DESCRIPTION CM Refrigerating Compressor PRR Phase Revarsal Relay OLR

PA3000/5000/PAX1000

P-80 (D)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Compact Manometer Series PPA 1

06 6 (mm size) KJH06-M5 Specifications Model PPA100 for high press.