Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: D (Push-turn Locking Slotted Style), A, B

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size:

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LN (L Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size:

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Base Mounted

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LN (L Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: D (Push-turn Locking Slotted Style),

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

lines indicate DIN rail mount type [-D] and connector top entry [-JU].

Speed Controller: Standard Type Series AS In-line Type 1

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

0.01

E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Vacuum Module Series ZX

K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

pressure: 0.5 MPa Inlet pressure: 0.5 MPa KE Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FG AS-FP AS-FM AS-D Number of needle rotations Number of needle rotations Number of needle rotations AS-T ASP Caution ASN Be sure to read this before handling the products.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.