SI Unit for Vacuum Manifold

Fieldbus interface connector BUS OUT/Port2: M12 4 pin socket D-coded (Port type: MDI-X) No. Designation Content 1 RD+ Receive Data + 2 TD+ Transmit Data + 3 RDReceive Data 4 TDTransmit Data BUS IN/Port1: M12 4 pin socket D-coded (Port type: MDI) No. Designation Content 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Fig. 2-1.

AME

E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5

Compact manifold regulator ARM5 Series

Accessories Pressure gauge Note) Extension tie-rod Symbol Yes Yes None None A B C D Note) Pressure gauges are not compatible with copper-free and fluorine-free specifications. 702 Compact Manifold Regulator ARM5A/B Series Centralized Supply Block 50 2 ARM5A 1 S 01 18.6 ARJ 16 1.

NVKF

Fl 20 stafrons r (Not mounled) Base mounted / Type 40 (A porl: bottom porting) NVV3KF3-40-OD.01T stations^ --'11--t -o Applicable valves NVKF334O OOO Applicable blank plate ass'y vK300-42-1A 2 stations oplional accessory .

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 40 (Base Mounted), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 2 Position Single, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1/4, Thread: -, Option

Type of Actuation: 2 Position Double, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1/4, Thread: -, Option

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1/4, Thread:

Type of Actuation: 2 Position Single, Manifold Type: Base Mounted, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: -, Option: -

Type of Actuation: 2 Position Double, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: -, Option: -

Type of Actuation: 3 Position Closed Center, Manifold Type: Base Mounted, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: -, Option: -

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: -, Option: -