0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.
8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
Lr=40 mm MXJ4 MXJ4 MXJ4 0.03 0.20 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXJ4-10 MXJ4-10 MXJ4-5 MXJ4-5 MXJ4-5 MXJ4-5 -10 0.08 -10 0.15 MXJ4-10 MXJ4-10 0.02 0.06 MXJ4-5 MXJ4-5 0.10 0.04 0.01 0.05 0.02 20 40 60 0 10 30 50 20 40 60 0 10 30 50 0 10 5 15 Load (N) Load (N) Load (N) MXJ6 MXJ6 MXJ6 0.04 0.10 0.20 Table displacement amount
to 40C (No freezing) Max. operating pressure 1.0 Internal tubing Polyurethane Outer layer Material Polyolefin (Equivalent to UL-94 standard V-0) 0 20 0 20 40 60 Note) The color of all inner tubing is black.
No 0 0 0001 0001 Servomotor Rotation Direction can *4 Pn000 0 (+Counter (+Counter (+Counter (+Counter motors side) motors side) motors side ) motors side ) Tuning-less Function Related Switch Pn170 1401 1401 Electronic Gear Ratio (Numerator) *3 Pn20E 4 65536 131072 65536 131072 65536 131072 65536 Electronic Gear Ratio (Denominator) *3 Pn210 1 750 375 375 750 375 375 125 0 625 62 100 0 500
MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.
(mm) Stroke range A Bore size (mm) CD (hole) MM AL B1 C CI CX D GA GB H H1 I J K KA L M NA P +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 M8 x 1.25 16 18 15.5 13 16.5 25 8 18 12 35 5 31 M4 x 0.7 5 6 14 3 29 1/8 to 200 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 25 8 M10 x 1.25 16 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 29 1/8 to 300 32
cover port location Axial direction (R) A F NA NB BB 0 -0.3 BA 0 -0.3 S + Stroke H Z + Stroke (mm) 11 11 11 3 CA GA BA CB GB GC F D BB A 3 NN Z T S NA M3 x 0.5 MM Bore size NB NDh8 8-0.022 H 9.5 9.5 7 0 18.3 15 15 15 15 15 16 10 6 28 28 28 17 17 20 M8 x 1.0 57.5 83 82 85.5 20.5 20.5 24.5 18.3 12 20 14 5 4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
9, @0, @1. Seal kit includes !9, @0, @1.
0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 100W when option: T is selected.
CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043
Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.
0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
B 0.03 60 50 40 0.02 VXFA24A VXFA24A 30 0.01 20 10 0 0 500 0 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm) Piping length to the pilot valve (mm) 0.05 100 90 0.04 80 Start-up speed (MPa/msec) ON response time (msec) VXFA28B VXFA26< VXFA27B 70 0.03 60 50 VXFA26< 0.02 40 VXFA27B 30 VXFA28B 20 0.01 10 0 0 0 500 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm)
0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.
0 u !0 !2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !
Operating temperature 32 to 104F (0 to 40C) Material Conductive nylon + Flame resistant nylon (Equivalent to UL-94 Standards V-0) Surface resistance 104 to 107 Hardness Shore D 48 Note 1) Refer to the burst pressure characteristics and operating pressure curve for other temperatures. Avoid abnormal temperature rises due to adiabatic compression.