Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Low Profile Slide Table Series MXF

160 200 50 100 150 200 0 0 0 Load (N) Load (N) Load (N) D-X Individual -X 139 Series MXF Construction !

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.210 inputs6 outputs1 M (when differential receiver), 200 k (when open collector)0 to ?

IDX-OM-V022

958 219 78 100 11.0 463 916 485 170 IDF90 Anchor bolt location Hole diameter:13 Unit: mm IDF80 IDF90 IDF60 745 (957) (Air dryer outside) (Air dryer outside) 704 916 (Air dryer outside) 330 355 (Air dryer outside) (485) 463 IDF70 890 (Air dryer outside) 849 (Air dryer outside) 365 390 IDF60/70/80/90 Series 7.3 Dimensions 7-3 IDX-OM-V022 Chapter 7 Documents 7.4 Electric circuit IDF60/70 200

Line filter

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Micro Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Fieldbus system DeviceNet TM compatible SI unit

Selects the time to hold the input signal. 15 ms 200 ms Memorizes the number of times the input device is ON. Generates error per channel when the operation count exceeds the set value. 3 Enable Generates an error.

Air Cylinder/With Auto Switch Series CDS1

Piston seal NBR Valve seal Non-lube Tube gasket CS1N125A-PS 125 140 160 180 200 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N140A-PS Piston gasket Component part numbers: @8, #0, #1, #2, #3, #5.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Y es Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Mechanically Jointed Rodless Cylinder Series MY1

300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Electric Actuator with Integrated Guide Series LTF

or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed mm/s Positioning repeatability mm Guide type Motor type Lead screw Series Capacity Brake Ground

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Compact Rotary Actuator Series CRQ2

300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Heatless Air Dryer Series ID

Fixed filter 0.5 MPa 0.7 MPa Silencer Time chart Electric circuit "Single phase 100 VAC, 200 VAC 50/60 Hz" Snap switch Fuse 1 cycle 1 cycle Inlet air temperature (C) (Saturation) Series IDAdsorbent/Silica alumina gel Series ID-Z Adsorbent/Permutite Timing motor Note 1) 100 VAC: Length of cord with attachment plug 2 m Note 2) 200 VAC: Length with cabtire cord 2 m 14-19-2 Heatless Air Dryer

Air Catch Sensor

ISA2-G 1 ISA2-G 5 ISA2-H 1 ISA2-H 5 Detection zone 0.01 to 0.25 mm 0.03 to 0.50 mm Fluid Dry air (Filtered through a 5 m filter) Operating pressure range 30 to 200 kPa 50 to 200 kPa Detection nozzle size 1.5 2.0 50 kPa 5 or less 10 or less Supplied pressure Flow consumption L/min (ANR) 100 kPa 8 or less 15 or less 200 kPa 12 or less 22 or less Power supply voltage 12 to 24 VDC10%, ripple

08-cds1-e

Piston seal NBR Valve seal Non-lube Tube gasket CS1N125A-PS 125 140 160 180 200 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N140A-PS Piston gasket Component part numbers: @8, #0, #1, #2, #3, #5.

Filter Regulator IW Series

500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [