lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

MXH

Refer to Graph (10) based on horizontal mounting, a speed of 500 mm/s and load eccentricity of 50 mm. In Graph (10), find the intersection of a 30 mm overhang and load weight of 0.1 kg, which results in a determination of 16. 8-2-13 12 Series MXH Construction MXH6 (6) MXH10 (10) y @1 !7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !

RZQ

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

mlu

Hs 34.5 41.5 49.5 58.5 A 9 9 9.5 11 Hs 37.5 44.5 52.5 61.5 A 2 2 2.5 4 Hs 35.5 42.5 50.5 59.5 A 5 5 0 1 Hs 39 46 54 63 A 5 5 5.5 7 Hs 33 40 48 57 A 10 10 10.5 12 Size A 4.5 4.5 5 6.5 Hs 32 39 47 56 Hs 25 32 40 50 0.5 2 56.5 66 Operating range Minimum strokes for auto switch mounting (mm) (mm) D-A7H, D-A80H D-A79W D-F7, D-J79 D-F7W, D-J79W D-F7BAL, D-F7NTL D-F7F Bore size 25 Auto switch

Compact Cylinder/Guide Rod Type Series CQM

size (mm) Stroke range (mm) EA A EB EC F HA HB IA IB J KA KB L M B B A 10 to 50 56 36 +0.2 0 63 66 46 77 74 59.6 10.5 M6 x 1 6 103 100 7 50 0.2 35.4 8 60 75, 100 66 46 10 to 50 67.5 43.5 +0.2 0 80 77.5 53.5 98 95 79.5 12.5 M8 x 1.25 8 132 129 6 65 0.2 46 10 77 75, 100 77.5 53.5 10 to 50 79 53 +0.2 0 100 89 63 117 114 99 13 M10 x 1.5 10 156 153 6.5 80 0.2 56.6 10 94 75, 100 89 63 P Bore

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

8 13 IFl M5 X 0.8, depth 5 Reference dimensions after thread installation M5 10 19 22 Width across flats 10 Gasket (Accessory) M5 X 0.8 13 R06 10 A 30 6 reducer Applicable fitting A 16 13 14.5 16 KQ 06-M5 H L T S Y Other series KQ, KS 13 KJ Series KJ (-X20) Series 3.1-4 Pressure Sensor For General Purpose Fluid Applications Series PSE520 How to Order PSE52 0 Operating pressure Porting High

CYP

Since alignment variations increase as the stroke gets longer, use a connection method which can absorb these variations and consider measures to control particulate generation. 10-AS2301F-01-06-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) 10-ASD330F-01-08 10-ASD230F-M5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Manifold Specifications

3 in the side added with manifold block. 2 stations (10 stations) 3 stations 2. Joint the tie-rod y to increase stations and add manifold block assembly. (Put packing B w on the surface contacting to the end plate.) (11 stations) 4 stations (12 stations) 5 stations 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !

CG1

L Dd9 m d t l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 C-8 type for pivot 16.2 20.2 36.2 44.2 56.2 64.2 21 25.6 41.6 50.6 64 72 1.5 1.55 1.55 2.05 2.55 2.55 7.6 9.6 9.6 13.4 17 21 0.9 1.15 1.15 1.15 1.35 1.35 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 20 25, 32 40 50, 63 80 100 C-10 type for pivot C-10 type for pivot C-14 type for pivot C-18

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

HRX-OM-I051

n k d r a i n p o r t Rotates 360.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm2 Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPQR04-06 KPGR04-06 38.4 19.1 3 6 4 M A L 17 4 4 10.4 KPQR04-08 KPGR04-08 40.9 19.2 4 8 KPQR06-08 KPGR06-08 41.5 19.8 4 6 12.8 18.5 10 10 KPQR06-10 KPGR06-10 44 20.2 5 Applicable fitting size d 10 KPQR08-10 KPGR08-10 46 5 8 15.2 20.5

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

3-R1.5 2-4.5 through ( A , B , C ) 15.5 45 9 2 36 3 42h9 0 0.062 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ported: MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 11-5-10 10 Series MSUA Rotary Table

SI unit

EX##-OMF0012 10 EX##-OMF0012-A No.EX-OMF0012-B -11- 6. Wiring 6-1 Communication line There are two connection types are available for slave of CompoBus/S, which are T branch and Multi drop. In T branch, slave is connected to stay branched from trunk and in Multi drop, slave is connected directly to trunk. However, in both types, it is impossible to branch from stay.