Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: -

Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: -

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: -

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: F [G, (w/Rc-G Conversion Fitting)]

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)]

Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46

LEC-OM02904

(1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

3 Port Air Operated Valve Series SYJA300

15.5 (For manifold mounting) 24 8.5 2.5 A 15 11 1 13 8.5 M5 x 0.8 34 (External pilot port) (Pilot port) (Bracket) (For solenoid valve) 2-4.5 Manual override (Non-locking) (Pilot port) (For mounting) M5 x 0.8 34 2-3.5 Manual override (Mounting hole pitch) (For mounting) (Non-locking) 8 10.6 9 A 1 32 24 15 X 24.5 18.6 (37) (30) 1 1.5 14.5 3 R P 23 21 34 4 33 42 4 4 2-2.6 (2.3) 39 (25) (18) 46

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

ZQ-OM01401

(41) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2

SYA3000/5000/7000

characteristics Mass (g) C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.44 0.61 0.16 0.64 0.45 0.18 0.46 0.13 0.47 0.43 0.48 0.13 Closed center Exhaust center Pressure center SYA320-M5 M5 x 0.8 0.42 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 3 position 39 0.50 [0.41] 0.48 [0.35] 0.15 [0.11] 0.47 0.43 0.13 44 46

5 Port Air Operated Valve SYA3000/5000/7000 Series

characteristics Weight (g) C[dm3/(sbar)] b Cv C[dm3/(sbar)] b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.61 0.16 0.64 0.45 0.18 0.44 0.13 0.47 0.43 0.48 0.13 0.46 Closed center Exhaust center Pressure center SYA320-M5 M5 x 0.8 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 0.42 3 position 39 0.50 [0.41] 0.15 [0.11] 0.47 0.43 0.48 [0.35] 0.13 44 46

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x F 2 30 24 M 0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3