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SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3.2 14.5 VP4 36 (45) S0700 (4.9) (37) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) VQ VQ4 (40.2) 12.7 40.4 (36.7) 28.1 [35.1] 20.5 + VQ5 VQC 15 0.8 (20) 1.6 VQZ For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 SQ VFS VFR M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5

Hydraulic

x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

MY1

50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

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K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.

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Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

SY

41 Type 42 Type 43 Type 41P Type 42P Type 43P Type 45 3 port valve Air operated 3 4 5 3 4 5 M type plug connector (M): SY3 20-ML type plug connector (L): SY3 20-LC4 C6 C4 C6 Grommet .SS5Y31, #3 L type plug connector .

Electric Actuator/Slider Type

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load

Battery-less

4 8 12 16 20 0 1 2 3 6 4 5 L8 Work load m [kg] Work load m [kg] Work load m [kg] Calculation of Guide Load Factor Mounting orientation 1.

Fluoropolymer Piping Equipment

28 16.5 4.4 LQ1B2E-M3/16" 2.9 LQ1B23-M 6 1/4" 22 3.6 LQ1B2F-M 1/8" 1.8 LQ1B24-M 4 2.6 TLM TILM LQ1B3A-M 3/8" 1/4" 19 LQ1B2F-M 3 1.8 5.8 25 LQ1B3B-M 1/4" 3.6 LQ1B31-M 10 1/4" 19 7.4 TD TID 5 20 9 18 17 36.5 23 8 LQ1B3C-M 3/8" 3/8" 21 27 5.8 LQ1B32-M 8 5.5 25 LQ1B3D-M 1/4" 3.6 LQ1B3F-M 3/8" 1/8" 18.4 29 21.9 4.4 4.4 LQ1B33-M 6 3.6 TH TIH 5 9 18 36.5 8 LQ1B34-M 10 3/8" 21 27 7.4 20 17 23 LQ1B4A-M

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 21 Courtesy of Steven

Auto Switch Guide

D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31 10-20-32 Grommet 10-20-33 Rail 10-20-34 Connector 10-20-35 Grommet Tie-rod 10-20-36 Terminal conduit 10-20-37 10-20-40 10-20-38 10-20-41 Grommet

Smooth Cylinder/Low Speed Cylinder

D C Clevis Pin (For CM2E) H B (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no. SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 Dd9 d 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 m m t t L L1 (mm) Trunnion Nut Applicable bore size (mm) 20, 25 32, 40 Applicable retaining ring part no. Dd9 d L L1 m t Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

style: CQ2F/CDQ2F RQ A Without auto switch B A FT FV FX FD FZ B With auto switch Bore size (mm) MU 5 st 5 st 10 st 5 st 10 st 5 st 10 st 10 st 20 st 20 st 20 st 20 st 32 40 50 56 62 76 5.5 5.5 6.6 28 50 60 38 65 72 89 60 33 70 43 8 8 9 45 54 67 D34.5 66.5 44.5 66.5 39.5 76.5 49.5 56.5 68.5 40.5 78.5 50.5 88.5 50.5 98.5 60.5 -X L L1 M Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st 2032

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ZS-10-5 A-50 1 pc. 0.6 m 30 3 m 50 5 m Specifications Model ZSP1-B ZSP1-S Fluid Air Operating pressure range 20 to 101 kPa Applicable adsorption nozzle dia. 0.3 to 0.7 (Refer to Graph (1) on page 16-7-3.) 0.5 to 1.2 (Refer to Graph (2) on page 16-7-3.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M B For 2 to 10 stations: Both sides Special combination 20 20 stations 20 For 20 stations Note) 25 type is able to use with individual SUP spacer and individual EXH spacer assembly. Refer to page 3-3-14.

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20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3