Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

VF1000-OMP0001

No.VF1000-OMP0001 5 VF1000/3000/5000 / / / / -2, 3 / -4, 5 -5 -6 -6 -6 -6, 7 -7 -7 -810 -11 -12 1 VF1000-OMP0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

AR20-B to AR60-B

AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Thermoelectric Bath

Allow margins for safety when selecting the model. 0.25 0.5 0.75 1.00 1.25 1.5 1.75 2.0 gpm 80 kPa 10 psi 70 9 60 7 Pressure loss 50 6 40 4.5 30 3.0 20 1.5 10 0 0 1 2 3 4 5 6 7 8 Flow rate (L/min) Parts Description Tank RUN LED TROUBLE LED Signal connector Facility water outlet Facility water inlet DC connector Display/Operation panel Fan Signal connector Alarm output connector DC output

Series 10-, 21- AF-A Air Filter

Note 7) A bowl guard is provided as standard equipment (nylon).

PAB-OM-K007

Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9. Operating principle P11 Safety instructions This operation manual indicates the precautions for safety use of process pump with the level of potential hazard as follows. Those precautions contain the content essential to keep safety.

SI unit for EtherCAT

(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.

SI unit for PROFINET

(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

ARX Series

) 7~45 (0.05 to 0.3) Low pressure Fluid Air ARX20-N01BG Ambient and fluid temperature 23~140F ( 5 to 60C) (with no freezing) Weight lbs (Kgf) .24 (0.11) How to Order ARX2 0 01 Regulator Options None Nil 1348112 K40-MP1.0-01S K50-MP1.0-02S K40-MP0.4-01S K50-MP0.4-02S K40-MP1.0-N01S K50-MP1.0-N02S K40-MP0.4-N01S K50-MP0.4-N02S 1348110A B Regulating pressure range Bracket 7~120psi 7~45psi 0

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

ZQ

power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Note 7) Note 7) ITVX Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Thermo-chiller

(50/60 Hz) [L/min] 7 (0.13 MPa)/7 (0.18 MPa) Maximum flow rate (50/60 Hz) [L/min] 27/29 Maximum pump head (50/60 Hz) [m] 14/19 Output [W] 200 Tank capacity [L] Approx. 5 Port size Rc1/2 Pump Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Alumina ceramic, Carbon, PP, PE, POM, FKM, EPDM, PVC Power supply Single-phase 200 to 230 VAC (50/60 Hz) Allowable voltage

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VFR2000-OMM0001

No.VFR2000-OMM0001 5 VFR2000 / / / / -2,3 -4 -5 -5 -6 -6 -6 -7 -7 -7 -8 -9 -9 -9 -10 3 -10 -10,11 DIN / -11 -11 -12,13 -14,15 -1No.VFR2000-OMM0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines

VEX-OMV0001

(1) (2) (3) 2(A)3(R)() (4) (5) 3(R) (6) 2(A)() (7) (8) (9) (10) (11) (12) 1 (ISO VG32) (13) 3(R) (14) (15) (16) (17) (18) (19) (20) (21) (22) 1. 2. 3. 4. 5. 6. 7. * 12 VEX-OMV0001 : VW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

LZ-OM003xx

L[]ZB[]3 119.5+st 69.7+st 4 6.8 L[]ZB[]5 155.5+st 92.7+st 4 7 Model no.

High Pressure Coolant Valve

Description Material Cast iron Note Plated 1 2 3 4 5 6 7 8 9 10 11 12 Undercover Body Cast iron Aluminum alloy Plated Cover Plate Iron Stainless steel Valve element A Valve element B Piston Return spring Stainless steel Aluminum alloy Piano wire Stainless steel Valve seat Stainless steel Rod Stainless steel Parallel pin Refer to How to Order Pilot Solenoid Valves on page 628.