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C 10 to 35 Facility water Facility water IN pressure MPa 0.3 to 0.7 (45 to 100 [PSIG]) Facility water port Rc 3/4 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 Main breaker amperes interrupting capacity kA 50 Dimensions *6 mm W380D665H860 (W14.96xD26.18xH33.86 [inch]) Weight (HRW-H / HRW-HS)*7 kg Approx. 90 (198 [lbs]) / Approx. 95 (209 [lbs]) Approx. 100 (221 [

Vibration resistance allows for normal operation of up to 30 m/s2 (45 to 250Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibration or impacts. High temperature types; (Temperature specifications/H0) 1. When a valve is to be heated, only the body section should be heated, excluding the bonnet section. Piping Caution 1.

ARG20P-270AS ARG20P-260AS ARG30P-270AS ARG30P-260AS ARG40P-270AS ARG40P-260AS ARG40P-270AS ARG40P-260S GB4-10AS GB4-3AS GB4-P10AS GB4-P3AS AD48 AD47 ARG30P-270AS ARG30P-260S GB3-10AS GB3-3AS GB3-P10AS GB3-P3AS AD38 AD37 ARG20P-270AS ARG20P-260S GB2-10AS GB2-3AS GB2-P10AS GB2-P3AS AD27 Set nut GB2-10AS GB3-10AS GB4-10AS Standard Pressure gauge 0 to 1.0 MPa 0 to 0.3 MPa 0 to 150 psi 0 to 45

Operating pressure [MPa] 0.15 to 0.6 0.1 to 0.6 Ambient and fluid temperature 10 to 60C (No freezing) Repeatability 0.1 Lubricant Non-lube Effective gripping force [N]1 at 0.5 MPa 14 45 74 131 Double-end type oil-impregnated resin bearings are used for all shafts. 1 Gripping point distance: 40 mm Model/Stroke Closing width [mm] (L1) Opening width [mm] (L2) Opening/Closing stroke [mm] (L2-

Applicable bore A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 1114 A Hy-rodless Cylinder ML1C Series Construction #9 %7 #8 #7 %6 !0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !

26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02

mA inrush current) 0.4V or less (At 16 mA inrush current) Output Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum response frequency 500Hz Indicator light Red LED (lights up when ON) Ambient temperature 10 to 55C Environmental resistance Ambient humidity 45

55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches

Gripping force per finger Effective value N Action Internal gripping force External gripping force 4 55 9.8 10 MHZ2-10D (N) 17 Double acting Single acting 6 115 30 16 40 MHZ2-16D (N) 10 235 42 20 66 MHZ2-20D (N) Single acting type, normally open 14 430 65 25 104 MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45

mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200 13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10

75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 P M5 x 0.8 Rc 1/8 N 4.5 7.5 PA 25 50 PB 60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model CYP15 CYP32 Note 1)

A Top cover Aluminum alloy 18 41 Chromated Electroless nickel plated Aluminum alloy Side plate B Cushion seal holder Aluminum alloy 19 42 CYP32 only Nickel plated Urethane Hexagon socket head cap screw Bumper Chrome molybdenum steel 20 43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45

A Top cover Aluminum alloy 18 41 Chromated Electroless nickel plated Aluminum alloy Side plate B Cushion seal holder Aluminum alloy 19 42 CYP32 only Nickel plated Urethane Hexagon socket head cap screw Bumper Chrome molybdenum steel 20 43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

Response time (1) 10 ms or less (AC), 45 ms or less (DC) 1,500 c.p.m. (AC), 180 c.p.m. (DC) Non-locking Max. operating frequency (2) VK Manual override Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

9 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT317 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF. (Value in the initial stage) Note 4) As per JIS C 0920 Manifold possible. When requiring bottom piping, please specify it.

Note 2) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

(Values at the initial period) Vibration resisitance: No malfunction occured in a one-sweep test between 45 and 2000 Hz. Test was perfomed at both energized and deenergized states in the axial direction and at the right angles to the main valve and armature.