CG5-S

18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 83 15 7 129.5 1/8 32 to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 85 16 6 131.5 1/8 40 to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 93 16.5 6.5 150 1/8 50 to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90

CJ5-S

18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x M3 x 0.5 thread depth 4 (With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 ( ) depth 3 +0.025 0 12 F +0.025 0 3H9 ( ) depth 3 N 1 x F 2 30 24 M 0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90

Sine Cylinder Series REC

Vertical mounting Cylinder orientation Horizontal mounting Size-up cylinder NO NO Use of external guide Load factor 50% YES YES Size-up cylinder or Use of external guide Size-up cylinder Size-up cylinder Examine lateral load, referring to graph (2) Examine buckling referring to table (1) Load factor 90% NG NG NO OK OK YES Model selected Selection Example 1 Selection Example 2 Actuating

60

3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90

Angle Seat Valve /

Symbol Rotation angle Insulated adapter Pilot port Nil IN OUT 90 Pilot port No XCA 90 Pilot port XCA 270 XCC IN OUT 270 Pilot port 1 (IN) 2 (OUT) XCC OUT IN Pilot port With insulated adapter XA XA Insulated adapter IN OUT 90 XAA 90 270 XAC Yes XAA 1 (IN) 2 (OUT) Pilot port With insulated adapter OUT IN 270 Pilot port With insulated adapter XAC IN OUT * For details about the insulated adapter

VZM400

Key can be removed at the on and off positions. 90 T.T.

XLAQ/XLDQ

Valve opening The time from the application of voltage to the actuation solenoid valve until 90% of the valve stroke has been completed is the valve opening response time. Valve opening operation time indicates the time from the start of the stroke until 90% of movement has been completed. Both of these become faster as the operating pressure is increased.

•

ZPmg 32.5 55.5 63.5 24 24 ZPT20 24 Zj:)T16 ~ 16 18 12.5 21.5 1.2 33 56 3.5 71 64 25 ZPT25 25 25 25 ZPT32 Deep type mm MpQet 'IA '18 C 0 E F H Y G ZPT40 90 90 90 90 ZPT10D 10 12 15 24 35.5 58.5 68.5 73.5 6 92 92 95 I : ZI?

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

REC

42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front flange: F 182 167 148 118 0.3 Foot: L L 1 140 128 114 90

CJ5-S

18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90

C76

+0.036 0 12 +0.043 0 0 0.033 9 30 38 32 40 M30 x 1.5 G 1/8 30 38 11 M8 x 1 34.5 58 7 38 23.8 17(19) 47 10 34.5 184 68 17 15.3 M10 x 1.5 0 0.039 M38 x 1.5 G 1/4 35 50 13 M10 x 1 42.5 8 69 45 28.3 22(25) 57 12 42.5 227 89 19 12 20 M12 x 1.75 ( ) : In the case of air cushion With rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90

MU

8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 H 14 14 15 18 21 ZZ 83 86 90

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) 20A B A + B + 90 20 25 32, 40 50, 63 50 50 50 50 175 170 170 175 35 30 30 35 A Data Clevis Pin 2-d Dd9 d Note) Cotter pin Bore size (mm) Model l m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

90

Precision Regulator IR1000-A/2000-A/3000-A Series RoHS ARJ Reduced by Up to approx. 90% AR425 to 935 Sensitivity: 0.2% (Full span) * Air consumption Repeatability: 0.5% (Full span) ARX [L/min (ANR)] AMR IR Current model Series ARM 1 or less 4.4 IR1000-A/IR2000-A 1 or less 11.5 IR3000-A Space saving ARP New structure without fixed throttle does not require a mist separator. * Compared with

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Byte 90 Output 8 to 15 SEN3 (Unit5) Byte 91 Byte 91 Output 16 to 23 Byte 92 Byte 92 Output 24 to 31 Byte 93 Byte 93 Padding data Total 90 byte Total 94 byte -83No.EX-OMX1011 Details of I/O map of the IO-Link master unit I/O map of the IO-Link master unit is described below.

Sensor Monitor

[F 3] Digital filter setting completed 1: Each set value is a guideline for 90% response time. 2: Both the switch output and pressure display are affected. When only switch output needs to be affected, select the delay time setting.