Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: A93 (A93--Reed, DC Volt, AC Volt, LED, Horizontal), Lead Wire: L (3m), Number of Switches, Mounting Position: A (2 pcs, Valve Open/Closed)

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

51

However, please contact SMC for water-resistant products of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

JIS Standard Hydraulic Cylinder

B64 M9NW Relay PLC Yes 3-wire (NPN) F59W Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit M9PW 3-wire (PNP) F5PW M9BW 24 V 2-wire 12 V Grommet J59W M9NA1 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V M9PA1 Water resistant (2-color indicator) M9BA1 2-wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Compact Cylinder with Air Cushion

IC circuit 5V A76H A96V A96 A72H A73H A72 A73 A73C 200V Grommet A93V A93 Reed switch Solid state switch Yes 100V 12V Relay, PLC 2-wire 24V Connector Diagnostic indication (2-color display) A79W Grommet F9NV F9PV F9BV F9NWV F9PWV F9BWV F9N F9P F9B F9NW F9PW F9BW F9BA F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) IC circuit 5V, 12V 3-wire

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

10-cls-e

function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

CLQ

Applicable models: D-A73/A73H/A73C D-A93/A93V 2) Note however, that in the case of 2 color indication auto switches (D-A79W), the switch will be in a normally ON condition if the wiring is reversed.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

A90 A90V No Reed switch Solid state switch 2-wire 24V A93 A93V Grommet 100V 12V Yes 3-wire (NPN equiv.) IC circuit 5V A96 A96V Mounting bracket part nos.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

Hydraulic Cylinders

Nil (Example) A93 3m . L (Example) A93L 5m .

Compact Hydraulic Cylinder Series CH
KGB

Nil (Example) A93 3m . L (Example) A93L 5m. Z (Example) F9NWZ Note) Solid state switches marked "" are produced upon receipt of order. Note) For cylinders with auto switches, the switches (already attached to mounting brackets) are packed together with the cylinder for shipment, but are not mounted on the cylinder.

Compact End Lock Cylinder Series CBQ2

with holding force equal to other series CBQ2 (A + Stroke) (N) 32 40 50 63 Bore size (mm) Holding force (Max.) 550 860 1340 2140 Series Variations Bore size (mm) Cushion Standard stroke (mm) Lock direction Manual release Model 10 15 20 25 50 75 100 Non-locking type Front lock CBQ2 Rubber bumper 32, 40, 50, 63 Rear lock Locking type Series CBQ2 How to Order B 50 D C 32 H L CBQ2 Standard A93

MXH Series Compact Slide

(Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state switches marked with a " " are produced upon receipt of order.

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M