VX21/22/23

8 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC Aluminum 4 5 N.O. 3/8 K 200 VAC 7 L 230 VAC 4 8 7 Resin (With bracket) M Conduit terminal 24 VDC With surge voltage suppressor 4 N 100 VAC 10 7 P 110 VAC A B C D E F G H J K L M N 5 Q 200 VAC Size 3 3 N.C. 8 1/4 R 230 VAC 10 (N.C. only) 6 N.O.

25

Avoid using in a place that exceeds an ambient humidity range. c. Avoid using in a place where condensation occurs due to a drastic temperature change. d. Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. e.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

2/3 Port Valve for Various

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

250 300 350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

IDX-OM-W037

Carry out checks to confirm there is no air leakage. 1 1 Cap bolt OUT IN 4 4 3 3 2 2 5 5 6 No Part name Part number IDH4 IDH6 1 Body 2 Element Element assembly AMHEL350 3 Gasket Element assembly AMH-EL250 4 O ring 5 Housing Case assembly AM-CA250C-D [For Option E] AM-CA250C-C Case assembly AM-CA350C-D [For Option E] AM-CA350C-C 6 Auto drain (2) Super mist separator element replacement procedure

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Ionizer Gun

Areas where ambient humidity exceeds the operating humidity range. c. Areas where abrupt temperature changes may cause condensation. d. Areas where corrosive gas, flammable gas or other volatile flammable substances are stored. e.

High Pressure Coolant Valve

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description Bracket (With bolt and washer) B How to Order Pilot Solenoid Valves VO307 1 Q D 5 CE-compliant Nil Q CE-compliant Rated voltage 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Light/surge voltage suppressor CE-compliant 3 110 VAC 50/60 Hz D DIN terminal DZ DIN terminal with light/surge voltage suppressor 4 220 VAC 50/60 Hz 5 24 VDC 6

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R

AMD

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)

Digital Flow Switch Series PFA For Air Series PFW For Water

J 40 Max. 30V 80mA or less OUT1 Black Load ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20

Digital Flow Switch (Integrated display type)

C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0008-C Dimensions (in mm) PF2A710/750 PF2A711/721/751 -38No.PF-OMO0008-C Lead wire and connector (Straight): ZS-37-A Lead wire and connector (Right angle): ZS-37-B Bracket: ZS-29-T Dimensions of rotating monitor part -39No.PF-OMO0008-C Made to Order Model Indication and How to Order Refer to page 10 for details of model indication and

PEEK

The values of Av and Cv are based on JIS B 2005:1995, C and b are based on JIB B 8390:2000.

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55

One-touch Fittings

D P [mm] M L2 A L1 2 x N Q Q D 2 x O d Applicable fitting size d Different Diameter Union Y: KQ2U Applicable tubing O.D.

PROFIBUS DP Compatible Fieldbus System

Green OFF COM C has no received data. COM C Green ON COM C is receiving data. Green OFF COM D has no received data. COM D Green ON COM D is receiving data. NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light.