Series MLGP

Auto switch proper mounting position (detection at stroke end) and its mounting height 20 to 100 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-Z7 Auto switch D-Z80 D-Y59 D-Y69 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA D-Y7BA D-P3DW *Cannot be mounted on bore size 20. 25 to 63 80 , 100 D-P4DW *Cannot be mounted on bore size 25 or less.) 32 to 63 80 to 100 Less than 25 to 75 strokes * For bore sizes

Fieldbus System

U side D side B B Note) Do not enter the SI Unit part number and the end plate part number together.

SMC

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

1

30 d (D) (C) (D) (C) H B H B Part no.

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

AHC System Series MA

Without D-sub connector D-sub connector entry With D-sub connector With robot cable Without D-sub connector D-sub connector entry With D-sub connector With robot cable Nil Robot adapter Applicable shaft diameter 8 10 11 AHC unit 14 15 20 24 25 M3 M5 Tool adapter Port MA310 1 MA320 1 MA210 Electric specifications Without D-sub connector Without D-sub connector D-sub connector entry With D-sub

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Trimmer Auto Switch

D-M9K, D-Y7K, D-F7K Application For relay and PLC Applicable amplifier unit D-RNK, D-RPK Indicator lamp Red lights ON at sensitive position.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

Air Cylinder Series CS2 ø125, ø140, ø160

D-A9, M9, M9W, M9AL are shipped together (but not assembled).

ALB900

G Note) Float switch specifications Voltage Max. cut off capacity Max. cut off current Contact Level indication 200 VAC, 200 VDC 12 VA AC, 10 W DC 0.6 A AC, 0.5 A DC 1a, 1b Bottom limit indication PPA How to Order AL ALB 900 0 0 10 S1 Float switch (Option) Booster lube Operation control signal Nil S1 S2 900 2 inch standard None 1b (Without oil ON) 1a (Without oil OFF) Body size 0 1 2 4 5

0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

VCHN

Width across flats PAT. 7 A Freeze reduction type/Option VCHNF Sleeve guide Resin Sleeve Copper tubing -06 to 14 3 4 AN VCHN (mm) AMC Model Port size (R) A B C D Mass (g) VCHN3-06 VCHNF3-06 VCHN3-10 VCHNF3-10 VCHN4-10 VCHNF4-10 VCHN4-12 VCHNF4-12 VCHN4-14 VCHNF4-14 3/4 200 72 74 41 590 AMV 3/4 200 72 74 41 710 1 200 72 74 41 605 AMP 1 200 72 74 41 725 1 230 72 74 41 665 1 230 72 74 41 810

“

Flow Rate Characteristics Relief Characteristics IR1220-01-A Supply pressure: 0.7 MPa IR1220-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

IDX-OM-V022

Note 2: For guidance on the Fluorocarbon Emission Control Law, please visit our website below. https://www.smcworld.com/products/ja/freon/ 7.2 Refrigerant and GWP value IDF60/70/80/90 Series 7-2 J N M L O K H IDX-OM-V022 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D

Mechanically Jointed Rodless Cylinder Series MY1

300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Electric Actuator with Integrated Guide Series LTF

A B Traveling accuracy (mm) Model D side against B side C side against A side LTF8 LTF6 0.02/200 or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed

Air Catch Sensor

ISA2-G 1 ISA2-G 5 ISA2-H 1 ISA2-H 5 Detection zone 0.01 to 0.25 mm 0.03 to 0.50 mm Fluid Dry air (Filtered through a 5 m filter) Operating pressure range 30 to 200 kPa 50 to 200 kPa Detection nozzle size 1.5 2.0 50 kPa 5 or less 10 or less Supplied pressure Flow consumption L/min (ANR) 100 kPa 8 or less 15 or less 200 kPa 12 or less 22 or less Power supply voltage 12 to 24 VDC10%, ripple

Suction Filter with Case FH99 Series

FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126