High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Digital Flow Switches

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

EXxx-OMO0027

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

MONOSASHI-KUN WITH BRAKE CONTROLLER

NO 100 200 200 YES Whether cylinder speed is within speed level as shown in allowable kinetic energy graph. 100 Load(kgf) Load(kgf) 80 NO 100 100 80 63 63 50 YES 50 0 0 Whether loading is under specific load as shown in graph.

Check Valve Series AK

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

E-MY2B_E_A

(3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Compact Vacuum Ejector Series ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Free Mount Cylinder

) 51 (61) 55 (65) 59 (69) 63 (73) -XC34 C(D)UK10-D 60 (85) 66 (96) 72 (102) 78 (108) 84 (114) 90 (120) C(D)UK16-D 113 (147) 124 (164) 136 (176) 148 (188) 160 (200) 172 (211) 195 (235) 219 (260) C(D)UK20-D Precautions 212 (266) 229 (288) 246 (305) 263 (322) 280 (339) 297 (356) 335 (390) 370 (424) C(D)UK25-D Be sure to read before handling.

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

2–4

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

VQ5000

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D