100

(Recommended tightening torque: 0.29 to 0.31 Nm) 23 73 87.5 29 Multistage Ejector ZL3/ZL6 Series Pressure switch for vacuum with energy saving function With supply valve and release valve Dimensions ZL6mmm-K1 B1 5mZm-E F mmm (With supply valve, release valve and vacuum pressure switch) Release valve Vacuum break flow adjusting needle 108 75 Supply valve 0.9 10.5 53 22.1 11.2 124 56 10.5 (

Ejector Valve Unit Series ZYY/ZYX

SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1SET 1SET 1SET 1SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side. For ejector valves only (Without solenoid valves: individual wiring type is compliant only.)

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

NCQ8

OUT IN Theoretical Output Table Unit: lbs Bore size (in) Operating direction Operating pressure/PSI (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) IN 8.87 14.6 28.6 39.2 056 (9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075 (3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106 (1-1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150 (1-1/2") OUT 79.5 131 256 351 IN 121 200 391 536

CRB2/CRBU2/CRB1

With auto switch CDRB1LW 50 CDRB1LW 63 CDRB1LW 80 CDRB1LW100 P411020-5 P411030-5 P411040-5 P411050-5 75 Series CRB1 Rotary Actuator with Built-in One-Touch Fitting: 50 Basic type CRB1W50F With auto switch CDRB1W50F- CRB1W50F-E CDRB1W50F-E Applicable tube and size Applicable tube

Refrigerated Air Dryer

Inlet air temperature Data Outlet air pressure dew point Data Inlet air pressure Series IDF Series IDU Series IDF, IDU Series IDF, IDU Correction factor Correction factor Correction factor Correction factor Inlet air temperature (C) Inlet air temperature (C) Outlet air pressure dew point (C) Inlet air pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 25 30 35 40 45 50 45 50 55 60 65 70 75

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 41.9 27.5 5.85 46.7 32.3 8.28 37.10 13.1 17.9 22.7 Double vane CRA1 33.8 21.9 4.26 37.6 25.7 6.18 30.0 10.4 14.2 18.0 Single vane 80 68.0 44.2 8.70 75.6 51.8 12.6 60.4 21.1 28.8 36.5 Double vane CRQ2 67.3 43.6 8.6 75 51.2 12.2 59.7 20.6 28.3 35.9 Single

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 41.9 27.5 5.85 46.7 32.3 8.28 37.10 13.1 17.9 22.7 Double vane CRA1 33.8 21.9 4.26 37.6 25.7 6.18 30.0 10.4 14.2 18.0 Single vane 80 68.0 44.2 8.70 75.6 51.8 12.6 60.4 21.1 28.8 36.5 Double vane CRQ2 67.3 43.6 8.6 75 51.2 12.2 59.7 20.6 28.3 35.9 Single

CC

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

ARM10/11

Accessory 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77 82 83 84 Nil A Without pressure gauge With pressure gauge Note) Pressure gauges are not available with the copperfree specification. 6.

NCA1

) 5/8 7/16-20 3/8 .75 3/4 2.6 1 1/8 3/4 1/2 1/2 2 1/2 9/16 0.3 5/16-24 3/8 1.06 3/8 1.26 0.62 3/4 0.62 1 5 1.71 3 5/8 2.4 4 3/4 1.84 250 (2.5) 5/8 7/16-20 3/8 .75 3/4 3.1 1 1/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 0.62 1 7/8 5 1.75 3 3/4 2.48 4 7/8 2.19 CS1 325 (3.25) 1 3/4-16 1/2 1.25 1 1/8 3.9 1 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3 3/4 1/2 5/8 0 1.57 1.05 0.87 1.18 1 3/8 1/2 7

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68 15 76 22 9 59 24 MXP12-25B 60 49 75

Fieldbus system EtherCAT compatible SI Unit

mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to +21.00 mA Correspondence table for user set upper or lower limit and output value at communication error and idling (CoE object /Web server) (Data format: Offset Binary /Signed Magnitude /2s Complement) Range Set value Expected value 0..10 V CoE/Web 0 to 1050 0.00 to +10.50 V 0..5 V CoE/Web 0 to 525 0.00 to +5.25 V 1..5 V CoE/Web 75

Fieldbus system PROFINET compatible SI Unit

.+20 mA 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0.00 to -21.00 mA 0..10 V 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by GSDML file.

Fieldbus system Ethernet POWERLINK compatible SI unit

Lower limit Upper limit Analog input /output measurement range Settable value range Setting Value Settable value range Setting Value 0..10 V 0.00 to +10.45 V 0 to 1045 +0.05 to +10.50 V 5 to 1050 0..5 V 0.00 to +5.22 V 0 to 522 +0.03 to +5.25 V 3 to 525 1..5 V +0.75 to +5.22 V 75 to 522 +0.78 to +5.25 V 78 to 525 0..20 mA 0.00 to +20.90 mA 0 to 2090 +0.10 to +21.00 mA 10 to 2100 4..20 mA

Digital Flow Switch ( compatible)

For instructions on how to enter the security code, refer to "How to input and change the security code" on page 75. After entry, the changed security code will flash by pressing the SET button for 1 second. (At this point, the changing of the security code is not completed) Return to the change of setting again by pressing the UP or DOWN button. Press the SET button to set.

PFxx-OMU0002

Refer to the dimension drawing (page 75) for the diameter and depth of the mounting screw holes. 15 No.PF-OMU0002-D Piping Do not connect equipment or piping which may generate a fluctuation in flow or drift at the IN side of the product. When installing a regulator at the IN side of the product, make sure that hunting is not generated.

Digital Flow Switch (Integrated display type)

Flow rate at normal condition 0.927 = Flow rate of standard condition -40No.PF-OMG0010-H Dimensions (in mm) PF2A703H/706H/712H Model A B C D E F G PF2A703H 55 mm 160 mm 40 mm 92 mm 67 mm 55 mm Rc1, NPT1, G1 PF2A706H 65 mm 180 mm 45 mm 104 mm 79 mm 65 mm Rc11/2, NPT11/2, G11/2 PF2A712H 75 mm 220 mm 55 mm 114 mm 89 mm 75 mm Rc2, NPT2, G2 Model H I J PF2A703H 36 mm M5 x 0.8 8 mm PF2A706H 46

XMC/XYC Series

Note3) Please contact SMC if you would like to change the material of the valve seal from ULTIC ARMOR to another material, or from another material to ULTIC ARMOR.. 6 XM-OMP0002-A Optional seal material FKM for PLASMA (Note 3) ULTIC ARMOR R EPDM (Note 3) Barrel Perfluoro R Kalrez R Chemraz R VMQ (Note 3) Seal material Compound No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.