LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

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V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV1 M9BA1 v v V v v 1 Water-resistant type auto switches can be mounted on the above models

Compact Guide Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV M9NA v v V v v IC circuit 3-wire (PNP) M9PAV M9PA v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV M9BA v v V v v Water resistant type auto switches can be mounted on the above models,

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

100

1999). *10 When V is selected for !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Digital Flow Switches

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Compact Vacuum Ejector Series ZQ

V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Air Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the above models, but

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12 V 12 V Relay, PLC 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit DGrommet A93V A90V A93 A90 100 V Relay, PLC 24 V 12 V 2-wire IC circuit 100 V or less -X Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable

Compact Vacuum Ejector Series ZA

V V V V ZA1 B M 1 J1 ZA1 FB M 1 Q1 N2 ZA1 1 Q2 N2 ZA1 FP M 1 K1 M P Circuit diagram Dimensions of the vacuum (V) and air pressure supply (P) port fittings after installation Dimensions after the fittings are installed on the vacuum (V) port, air pressure supply (P) port of a single unit, and the common air pressure supply (P) port of a manifold are shown below.

Rotary Table/Vane Style Series MSU

Heavy-duty cord 3-wire (PNP) MDSUA1 12 V Relay, MDSUA3 5 V, 12 V 5 V, 12 V, 24 V Parallel cord 24 V Grommet IC circuit PLC 2-wire 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord Heavy-duty cord 100 V 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Flow Sensor Series PFMV

Item Input voltage 0 0.7 V 5.10 V 5.20 V Voltage input range Displayable range LLL HHH Settable range PFM PFMV PF2A PF2W PF2D IF 969

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V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Electrical entry (Fetching direction) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) (mm) Type Model Features Grommet (In-line) D-A90 Stroke (mm) 20 41 29 47 35 Without indicator light Stroke (mm) 10

Compressed Air Cleaning Filter Series

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.