3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

Wedge Cam Operation Gripper Series MHK2

X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing port) Groove position

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 8 6.5 N x M3 x 0.5 thread depth 4.5 Note 1) Note 2) Retraction end adjuster Extension end adjuster 3 depth 3 +0.03 0 22.5 (Extension end adjuster) 3.5 6.5 4 0.7 6.5 (Extension end adjuster) 0.3 22.2 15 17 36 24 16 32 1 12 16 F 3 depth 3 +0.03 0 5 4 x M3 x 0.5 thread depth 4 2 N 1 x F 10 30 3 x M4 x 0.7 thread depth 6 M 24 14.6 KA NA x M3 x 0.5

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19 28 3 x M3

PF2A7H.eng

Accumulated output mode Excessive accumulated flow Lower digits Exceeds the range of the 2nd. turn of flow indication. ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ANR OUT ANR OUT Time Do not touch the terminals and connectors while the power is on.

Series SYJA300 3 Port Air Operated Valve

3 Port Air Operated Valve Series SYJA300 Model Compact/Lightweight Copper free Effective area (mm2) (Cv) Valve model Actuation Port size Weight (g) Pilot port size SYJA312-M3 N.C. M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O.

Thermo-dryer

The intersection H is the amount of moisture included in the compressed air 35 ft3 (1 m3) at 102psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 0.003 oz./ft3 (3.0 g/m3). 10.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

case of M3 Dimensions with broken lines stand for a locking knob type.

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

3

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).

IZ-OMK0015

Mount the sensor head using two M3 screws (not supplied with the product). M3 screws M3 screws M3 screws Due to the construction of the sensor, the sensor head housing is shared with GND. Install and supply power with great caution to avoid short-circuit with the +24 V power supply. The detection port is opened to detect static electricity.

IZx-OMR0035

To secure the emitter cartridge with a screw, use an M3 x 0.5 12mm cross recessed round head screw (The screw needs to be prepared by the user). M3 screw recommended tightening torque is 0.25 to 0.35 Nm. Install the ionizer so that the emitter cartridge can be removed for maintenance and replacement of the emitters.

CYV

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

180° Angular Style Air Gripper Series MHY2/MHW2

. : MH-G04 (30g) 664 Series MHY2 180 Angular Style Air Gripper Cam Style Dimensions MHY2-10D Pin hole positioning 30 9 9 2 x M3 x 0.5 thread depth 4 4 (Thread for mounting attachment) 4 x M3 x 0.5 through (Mounting thread) 3H9+ 0.025 0 depth 3 6 0.005 0.025 4 4 x M3 x 0.5 thread depth 6 3 6 (Mounting thread) 2 x 3.4 through 2 x M3 x 0.5 depth 6 12 (Mounting hole) (Mounting thread) (Limted

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.