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x n +4 x (n -1) -57No.PS-OMM0002CN-F A B C D E 4 OFF F SMC URL http://www.smcworld.com 2008-2014 SMC Corporation All Rights Reserved No.PS-OMM0002CN-F

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

n*n" ,n ,n"n"" I *' ,.o... .,"," 1 9 1 9 21 t8 1 8 1 8 21 '17 I ,u,*""0" 1 7 17 1 9 1 9 29 23 Note: See specific page # for which combinations ar available. fcEd lmft [ilrtrc ol PS lhcaft 1/4 NPT B ( # ) 3/8 NPT 1i2 NPT D 1/8 NPT A /A, \v .540" DtA .666" DIA .840' OIA .,tsS'DIA 1 6 T.Pl. = Threads oer inch L.NGNTPPLE Longr lengihs a\,ailaH upon rqu$t CLOSE NIPPLE HEX NIPPLE Long paurn 138Inchs

Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide Table Series MXF Table Displacement

Work 1 Work 2 Work n Atmosphere A = Maximum pressure value B = Minimum pressure value P-1 = A (A B) / 4 H-1 = (A B) / 2 For compound pressure PSE533 PSE543 PSE563 For low differential pressure For low pressure For vacuum For positive pressure Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

1/8, 1/4 (A port) P = 26 L Dimension n: Stations Stations Formula L1 = 26 x n + 24 L2 = 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

Nil S n Bearing type Slide bearing Ball bushing bearing M L Mounting style Auto switch Basic style Front mounting flange style Nil Without auto switch (Built-in magnet) B F For the applicable auto switch model, refer to the table below.

14 Valve O-ring NBR 1 O-ring Bracket A P3 P5 7 2 O-ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hexagon socket head cap screw 28 X 25 X 1.5 35 X 31 X 2 8 15 O-ring NBR How to Order (1) When adding n stations to ARM : Regulator n pcs.

OUT OUT Proper Auto Switch Mounting Positions (Stroke End) Proper Auto Switch Mounting Positions(Series CE1) Auto switch (mm) Bore size (mm) Auto switch model Symbol 20 32 40 50 63 12 A B A B A B A B A B A B A B A B A B 40.5 47 55 79 82 85.5 D-A7, A8 4 13 17 39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5

Auto shift error Adsorption verification Internal data error High Vacuum Absorption Internal data error Work 1 Work 2 Work n Max. A System error P-1 Internal data error H-1 Internal data error Min. B Nonabsorption H Unit display switching function Work 1 Work 2 Work n Atmosphere Display units can be switched with this function.

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.